Product Overview
The HORIBA STEC SEC-Z514MGX is a high-precision mass flow controller (MFC) engineered for accurate measurement and regulation of process gas flow in demanding industrial and semiconductor-grade applications. Utilizing a thermal sensing element combined with a fast-response proportional control valve, this unit delivers stable, repeatable flow control independent of upstream pressure fluctuations. The SEC-Z514MGX is a direct-fit replacement component designed for integration into OEM gas delivery panels, thin-film deposition systems, and precision process lines where contamination control and long-term drift stability are critical.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Mass Flow Controller (Process & Pneumatic Valve) |
| Model Designation | SEC-Z514MGX |
| Manufacturer | HORIBA STEC |
| Operating Pressure | Standard Industrial Grade (up to rated process pressure) |
| Flow Control Principle | Thermal mass sensing with proportional solenoid-actuated control valve |
| Mounting & Connection | Standard ISO / Manufacturer Interface (VCR or equivalent process fitting) |
| Seal & Wetted Materials | Corrosion-resistant metal body with elastomer or metal seals per OEM spec |
Engineering Features & Advantages
- Precision Performance: Advanced thermal mass sensing provides accurate, repeatable flow measurement with minimal sensitivity to temperature and pressure variation, ensuring process consistency.
- Fast Dynamic Response: Proportional control valve actuation enables rapid setpoint tracking and stable regulation during transient process conditions.
- Industrial Reliability: Built for continuous operation under severe industrial conditions, with a robust valve body and contamination-resistant internal flow path.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original OEM standards, allowing drop-in replacement without system reconfiguration.
Typical Industrial Applications
Commonly deployed in semiconductor thin-film deposition and etch tools, precision gas blending and delivery panels, analytical instrumentation and laboratory process systems, and industrial coating or surface treatment lines requiring accurate pneumatic flow regulation.
PRODUCT IMAGES
HORIBA STEC SEC-Z514MGX Mass Flow Controller
âš¡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
Shop the genuine HORIBA STEC SEC-Z514MGX Mass Flow Controller. This Japan-made high-precision thermal flow controller features a fast-response sensor and control valve, delivering accurate, reliable gas flow control for semiconductor and industrial processes.