Product Overview
The HORIBA STEC UR-Z734M-B is a precision mass flow controller engineered for accurate measurement and regulation of gas and process fluid flow in demanding industrial environments. As a member of the HORIBA STEC UR-Z700 series, this instrument combines a thermal or pressure-based flow sensing element with a fast-acting proportional control valve to deliver stable, repeatable flow control across a wide dynamic range. The UR-Z734M-B is designed for integration into process gas delivery systems, pneumatic control loops, and analytical instrumentation where precise flow metering is critical. Its compact footprint, all-metal sealed construction, and high-resolution control electronics make it suitable for semiconductor manufacturing, thin-film deposition, and other high-purity industrial processes requiring reliable, low-drift flow regulation.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Mass Flow Controller (Process & Pneumatic Valve) |
| Model Designation | UR-Z734M-B |
| Manufacturer | HORIBA STEC |
| Operating Pressure | Standard Industrial Grade (Up to rated bar) |
| Mounting & Connection | Standard ISO / Manufacturer Interface |
| Control Principle | Proportional valve actuation with closed-loop flow feedback |
| Sealing & Body Material | All-metal sealed construction for high-purity media compatibility |
Engineering Features & Advantages
- Precision Performance: Closed-loop flow control with high-resolution sensing delivers accurate setpoint tracking and minimal drift, ensuring repeatable process results.
- Fast Dynamic Response: The integrated proportional control valve provides rapid actuation for stable flow regulation during transient process conditions.
- Industrial Reliability: Built for continuous operation under severe industrial conditions, with robust construction resistant to thermal cycling and vibration.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original OEM standards, allowing drop-in replacement without system modification.
- Wide Turndown Ratio: Maintains control accuracy across a broad flow range, reducing the need for multiple controller sizes in a single system.
Typical Industrial Applications
The HORIBA STEC UR-Z734M-B is deployed in semiconductor fabrication for process gas delivery and plasma etch/ deposition control, in thin-film and vacuum coating systems requiring precise precursor flow, in analytical and laboratory instrumentation for carrier and reagent gas regulation, and in general industrial process gas panels where accurate, repeatable flow control is essential for product quality and safety.
PRODUCT IMAGES
HORIBA STEC UR-Z734M-B Mass Flow Controller
âš¡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
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