Product Overview
The LAM RESEARCH 796-098943-005 is a precision-engineered semiconductor process valve designed for critical fluid and gas control applications within wafer fabrication equipment. Manufactured by Lam Research, a global leader in semiconductor process equipment, this valve serves as an essential component in vacuum and process gas delivery systems. It operates as a direct-acting, normally-closed isolation valve, providing reliable on/off control of high-purity process gases and aggressive chemistries used in plasma etching, chemical vapor deposition (CVD), and atomic layer deposition (ALD) processes. Its robust construction ensures leak-tight sealing, minimal particle generation, and compatibility with corrosive media, making it indispensable in maintaining process chamber integrity and yield in advanced semiconductor manufacturing.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Process & Pneumatic Valve (Semiconductor Process Valve) |
| Model Designation | 796-098943-005 |
| Operating Pressure | Standard Industrial Grade (Up to rated bar) |
| Mounting & Connection | Standard ISO / Manufacturer Interface |
Engineering Features & Advantages
- Precision Performance: Direct-acting solenoid or pneumatic actuation ensures rapid, repeatable response times with precise flow control, critical for maintaining stable process conditions in semiconductor fabrication.
- Industrial Reliability: Built for continuous operation under severe industrial conditions, including high-cycle life and resistance to corrosive process gases, ensuring minimal downtime in wafer fabs.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original OEM standards, allowing seamless integration into existing Lam Research process tools without modification.
Typical Industrial Applications
This valve is typically employed in semiconductor manufacturing equipment such as plasma etch chambers, chemical vapor deposition (CVD) reactors, atomic layer deposition (ALD) systems, and vacuum load-lock modules. It is also suitable for other high-purity gas delivery systems in photovoltaic and LED fabrication, as well as in industrial coating processes requiring precise gas isolation and control.
PRODUCT IMAGES
LAM RESEARCH 796-098943-005 Semiconductor Process Valve
âš¡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
Shop the genuine LAM RESEARCH 796-098943-005 Solenoid Valve. This USA-made 24 VDC hydraulic component features a 2-way normally closed design, delivering leak-free, reliable fluid control for heavy-duty industrial systems.