Product Overview
The MKS 0190-76185 / L2-40-SP1 is a precision-engineered vacuum isolation valve designed for reliable shut-off and control of gas flow in low-pressure and vacuum process lines. Manufactured by MKS Instruments, a global leader in vacuum and pressure measurement and control technology, this valve operates as a pneumatically or manually actuated process valve within the broader family of general process and pneumatic valves. The L2-40-SP1 designation indicates a 40-series body size with a specific seat and port configuration (SP1 variant), making it suitable for integration into semiconductor, thin-film, and industrial vacuum systems where leak-tight sealing and repeatable actuation are critical. Its robust construction ensures minimal outgassing and high cycle life, positioning it as a dependable component for demanding process environments.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | General Process & Pneumatic Valve (Vacuum Isolation Valve) |
| Model Designation | MKS 0190-76185 / L2-40-SP1 |
| Operating Pressure | Vacuum to low positive pressure (typical process range up to 1–2 bar differential) |
| Mounting & Connection | Standard ISO-KF / CF flange or manufacturer-specific vacuum interface |
| Actuation Type | Pneumatic or manual (per SP1 configuration) |
| Body Material | Stainless steel (typical for vacuum service) |
| Seal Material | Elastomer (e.g., Viton®) or metal seat for high-vacuum compatibility |
Engineering Features & Advantages
- Precision Performance: Designed for leak-tight vacuum isolation with low internal volume and minimal dead space, ensuring fast pump-down and stable process pressure control.
- Industrial Reliability: Built for continuous operation under severe industrial conditions, including high cycle rates and exposure to corrosive process gases when specified with appropriate seals.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original OEM standards, allowing drop-in replacement for MKS 0190-76185 / L2-40-SP1 valves without modification to existing vacuum lines.
- Cleanroom-Compatible Construction: Low particle generation and minimal outgassing, suitable for semiconductor, coating, and analytical instrumentation environments.
Typical Industrial Applications
This vacuum valve is commonly used in semiconductor wafer processing equipment (CVD, PVD, etch), thin-film deposition systems, analytical mass spectrometry and leak detection instruments, and industrial vacuum furnaces or coating lines. It is also found in pharmaceutical freeze-drying and general process vacuum isolation where reliable shut-off and contamination-free operation are required.
PRODUCT IMAGES
MKS 0190-76185 / L2-40-SP1 Vacuum Valve
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