Product Overview
The MKS 153F-3-80-2 is a precision-engineered exhaust throttle valve designed for accurate flow control in vacuum and process gas systems. Manufactured by MKS Instruments, a global leader in vacuum and pressure measurement and control solutions, this valve operates by throttling the exhaust path of a vacuum pump or process chamber to regulate system pressure. Unlike hydraulic directional or pressure control valves, the 153F series is a dedicated exhaust throttle valve that provides smooth, repeatable conductance adjustment, enabling stable pressure regulation in demanding semiconductor, thin-film, and industrial vacuum processes. Its robust construction and precise actuation make it an essential component for maintaining process stability and repeatability in high-purity environments.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Exhaust Throttle Valve (Process & Pneumatic Valve) |
| Model Designation | MKS 153F-3-80-2 |
| Operating Pressure | Standard Industrial Grade (Up to rated vacuum/pressure bar) |
| Mounting & Connection | Standard ISO / Manufacturer Interface (KF, CF, or flange per model) |
| Valve Actuation | Manual or motorized throttle (dependent on configuration) |
| Flow Characteristic | Linear or equal-percentage throttling for precise conductance control |
| Body Material | Stainless steel or aluminum alloy (corrosion-resistant) |
| Seal Material | Viton / PTFE / Kalrez (high-vacuum compatible) |
Engineering Features & Advantages
- Precision Performance: Provides fine, repeatable throttling of exhaust flow to maintain stable chamber pressure, critical for process repeatability in vacuum systems.
- Industrial Reliability: Built for continuous operation under severe industrial conditions, with robust materials and sealing designed for high-cycle life.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original OEM standards, ensuring drop-in replacement without system modification.
- Low Particle Generation: Designed for cleanroom and high-purity applications, minimizing contamination risk.
- Wide Conductance Range: Offers broad adjustment range to accommodate varying process gas loads and pump speeds.
Typical Industrial Applications
This exhaust throttle valve is commonly used in semiconductor manufacturing equipment (etch, CVD, PVD), vacuum coating systems, analytical instrumentation, and industrial vacuum furnaces. It is also suitable for process gas control in thin-film deposition, plasma processing, and other high-purity vacuum environments where precise pressure regulation is essential for product quality and process stability.
PRODUCT IMAGES
MKS 153F-3-80-2 Exhaust Throttle Valve
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- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
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