Product Overview
The MKS 3340-21010 is a high-precision vacuum isolation valve engineered by MKS Instruments, a global leader in vacuum and pressure measurement and control solutions. Designed for the semiconductor, thin-film, and industrial vacuum markets, this valve serves as a critical component in vacuum process lines, providing reliable on/off isolation between vacuum chambers and pumping systems. The 3340 series utilizes a pneumatically actuated, bellows-sealed design that ensures leak-tight performance while minimizing particle generation and outgassing. Its robust construction allows for repeated cycling in demanding process environments, making it an essential component for maintaining vacuum integrity and process repeatability in high-purity and high-vacuum applications.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Vacuum Isolation Valve (Process & Pneumatic Valve) |
| Model Designation | MKS 3340-21010 |
| Operating Pressure | Vacuum to positive pressure rated (up to 150 psig / 10 bar) |
| Mounting & Connection | Standard ISO-KF / CF flange interface (model-dependent) |
| Actuation Type | Pneumatic (air-to-open or air-to-close configurations) |
| Seal Material | Bellows-sealed, Viton or Kalrez elastomer options |
| Leak Rate | < 1 × 10⁻⁹ std cc/sec He (helium leak-tight) |
| Body Material | Stainless Steel (316L) |
Engineering Features & Advantages
- Precision Performance: Bellows-sealed stem design eliminates elastomer diaphragm wear and ensures consistent, repeatable sealing performance over millions of cycles, maintaining vacuum integrity in high-purity processes.
- Industrial Reliability: Constructed from corrosion-resistant 316L stainless steel with a robust pneumatic actuator, built for continuous operation under severe vacuum and process conditions.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original MKS 3340 series valves, ensuring drop-in replacement without modification to existing vacuum lines.
- Low Particle Generation: Metal bellows and precision-machined sealing surfaces minimize particulate contamination, ideal for semiconductor and cleanroom environments.
- Fast Actuation: Pneumatic operation provides rapid open/close response, reducing cycle times in automated vacuum process sequences.
Typical Industrial Applications
The MKS 3340-21010 vacuum isolation valve is widely used in semiconductor manufacturing equipment (PVD, CVD, etch, and ion implantation systems), thin-film deposition lines, vacuum coating and sputtering systems, analytical instrumentation (mass spectrometry and electron microscopy), and industrial vacuum furnaces. It is also suitable for pharmaceutical freeze-drying processes and high-energy physics research applications where reliable vacuum isolation and contamination control are paramount.
PRODUCT IMAGES
MKS 3340-21010 Vacuum Isolation Valve
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
Shop the genuine MKS 3340-21010 Solenoid Directional Control Valve. This Germany-made 24V DC hydraulic component features a 4-way 3-position design, delivering leak-free, reliable fluid control for heavy-duty industrial systems.