Product Overview
The MKS T3BIA01K22K2215 is a precision-engineered exhaust throttle valve designed for accurate flow control and pressure regulation in industrial process and pneumatic systems. Manufactured by MKS Instruments, a global leader in vacuum and gas flow control technology, this valve operates by modulating the exhaust path of a gas stream to precisely control chamber pressure, flow rate, or downstream vacuum levels. Unlike hydraulic directional or pressure control valves, the T3BIA01K22K2215 functions as a throttling device within pneumatic and process gas circuits, offering fine-resolution conductance adjustment for critical vacuum and pressure management applications. Its robust construction and exacting tolerances make it an essential component in semiconductor processing, thin-film deposition, and advanced industrial vacuum systems.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Exhaust Throttle Valve (Process & Pneumatic Valve) |
| Model Designation | MKS T3BIA01K22K2215 |
| Operating Pressure | Standard Industrial Grade (Up to rated bar, vacuum to positive pressure service) |
| Mounting & Connection | Standard ISO / Manufacturer Interface (KF, CF, or threaded flange options per MKS standard) |
| Actuation Type | Manual or Motorized Throttle Actuation (model-dependent configuration) |
| Body Material | Stainless Steel (corrosion-resistant, vacuum-compatible) |
| Seal Material | Viton / PTFE (high-temperature and chemical-resistant options) |
| Leak Rate | < 1 × 10⁻⁹ std cc/sec He (typical for high-vacuum service) |
Engineering Features & Advantages
- Precision Throttling Control: Fine-resolution conductance adjustment enables accurate pressure and flow regulation in vacuum and pneumatic process lines, ensuring stable process conditions.
- Vacuum-Compatible Construction: Stainless steel body and high-integrity elastomer seals deliver reliable performance in high-vacuum environments with minimal outgassing.
- Industrial Reliability: Built for continuous operation under severe industrial conditions, including corrosive gas exposure and elevated temperatures.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original MKS OEM standards, ensuring drop-in installation without modification.
- Low Particle Generation: Smooth throttle mechanism minimizes particulate contamination, critical for semiconductor and thin-film processes.
Typical Industrial Applications
The MKS T3BIA01K22K2215 exhaust throttle valve is widely deployed in semiconductor fabrication equipment for chamber pressure control during plasma etching and CVD processes, in thin-film deposition systems requiring precise vacuum regulation, in industrial vacuum furnaces and metallurgical processing where controlled exhaust conductance is essential, and in general process gas handling systems across pharmaceutical, chemical, and advanced manufacturing environments. Its robust design also suits R
PRODUCT IMAGES
MKS T3BIA01K22K2215 Exhaust Throttle Valve
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
Shop the genuine MKS INSTRUMENTS T3BIA01K22K2215 Solenoid Directional Control Valve. This USA-made 24 VDC hydraulic component features a 4-way 3-position design, delivering leak-free, reliable fluid control for heavy-duty industrial systems.