Product Overview
The MKS UHV-40-ACC-EAVM is a precision-engineered Ultra High Vacuum (UHV) angle valve designed for critical vacuum isolation and process control in semiconductor, thin-film deposition, and advanced research environments. Manufactured by MKS Instruments, a global leader in vacuum and pressure measurement solutions, this valve features a pneumatically actuated, normally-closed (or configurable) bellows-sealed mechanism that ensures leak-tight performance down to 10-10 mbar ranges. The angle body configuration provides unobstructed, high-conductance flow paths, minimizing pressure drop and enabling rapid pump-down cycles. Its robust construction and elastomer or metal seal options make it an ideal choice for demanding UHV applications where contamination control and repeatability are paramount.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Ultra High Vacuum Angle Valve (Pneumatic / Process Valve) |
| Model Designation | MKS UHV-40-ACC-EAVM |
| Operating Pressure | UHV compatible (10-10 mbar range); actuation pressure 4–7 bar (pneumatic) |
| Mounting & Connection | ISO-KF / CF flange options (DN40); standard pneumatic interface |
| Body Material | Stainless Steel 304/316L (vacuum-grade) |
| Seal Material | Elastomer (Viton®) or Metal (CF) – dependent on configuration |
| Actuation Type | Pneumatic, double-acting or spring-return (normally closed) |
| Leak Rate | < 1 × 10-9 mbar·L/s (helium) |
| Temperature Range | Up to 150°C (depending on seal material) |
Engineering Features & Advantages
- Precision Vacuum Control: Bellows-sealed stem design eliminates particle generation and ensures repeatable, leak-tight isolation in ultra-high vacuum environments.
- High Conductance Angle Body: Optimized flow path reduces pump-down time and minimizes pressure differential across the valve, enhancing process efficiency.
- Industrial Reliability: Constructed from vacuum-grade stainless steel with rigorous helium leak testing, built for continuous operation in harsh semiconductor and coating processes.
- Direct Fit Replacement: Exact dimensional and functional compatibility with MKS UHV-40 series and equivalent OEM flange standards, ensuring drop-in installation.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original MKS OEM standards, ensuring drop-in replacement without modification to existing manifolds or piping.
Typical Industrial Applications
Its robust construction and elastomer or metal seal options make it an ideal choice for demanding UHV applications where contamination control and repeatability are paramount.
PRODUCT IMAGES
MKS UHV-40-ACC-EAVM Ultra High Vacuum Angle Valve
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- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
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- Peace of Mind: Covered by our 12-Month Replacement Warranty.
Shop the genuine MKS UHV-40-ACC-EAVM Vacuum Angle Valve. This USA-made 24 VDC vacuum component features a pneumatic angle design, delivering leak-free, reliable vacuum control for heavy-duty industrial systems.