Product Overview
The Pfeiffer Vacuum SplitFlow 310 / PM P04 550 is a high-performance turbomolecular vacuum pump engineered for demanding industrial vacuum generation. Featuring Pfeiffer’s proprietary SplitFlow technology, this pump delivers two distinct pumping stages on a single rotor shaft, enabling differential pumping between high-vacuum and forevacuum ports. The PM P04 550 drive unit provides a robust, maintenance-friendly interface with integrated electronic frequency converter for precise speed control. This pump is designed for applications requiring hydrocarbon-free, high-vacuum conditions with high pumping speeds for light gases, making it ideal for semiconductor manufacturing, coating systems, and analytical instrumentation.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Turbomolecular Vacuum Pump |
| Model Designation | SplitFlow 310 / PM P04 550 |
| Operating Pressure | High-vacuum range (Ultimate pressure < 10⁻⁷ mbar) |
| Mounting & Connection | Standard ISO-K / CF flange interfaces |
Engineering Features & Advantages
- SplitFlow Technology: Dual-stage rotor design provides two independent pumping ports, enabling differential pumping and optimized vacuum performance for light gases.
- Hydrocarbon-Free Operation: Fully dry, oil-free compression path ensures contamination-free vacuum for sensitive processes.
- Integrated Drive Electronics: PM P04 550 controller offers precise speed regulation, soft-start, and comprehensive status monitoring for reliable continuous operation.
- Industrial Reliability: Built for continuous operation under severe industrial conditions with robust bearing systems and thermal management.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original Pfeiffer Vacuum OEM standards.
Typical Industrial Applications
Semiconductor manufacturing equipment (PVD, CVD, ion implantation), high-vacuum coating systems, analytical instrumentation (mass spectrometry, electron microscopy), and research & development laboratories requiring clean, high-vacuum environments with differential pumping capabilities.
PRODUCT IMAGES
Pfeiffer Vacuum SplitFlow 310 / PM P04 550 Split-Flow Turbomolecular Vacuum Pump
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
Shop the genuine PFEIFFER VACUUM SplitFlow 310 / PM P04 550 Multi-Stage Roots Vacuum Pump. This Germany-made high-performance vacuum pump features a multi-stage Roots design, delivering leak-free, reliable vacuum generation for heavy-duty industrial systems.