Product Overview
The SMC XLA-50-2M9BLA-XANIA is a high vacuum angle valve engineered by SMC Corporation, a global leader in pneumatic and vacuum control technology. This component operates on a pneumatically actuated bellows-sealed mechanism, providing reliable isolation and conductance control in high vacuum process lines. Unlike standard hydraulic directional valves, this angle valve is purpose-built for vacuum service, featuring a right-angle flow path that minimizes pressure drop and optimizes pumping efficiency. It serves as a critical isolation and control element in semiconductor fabrication, thin-film deposition, and other high-purity vacuum systems where precise, leak-tight shutoff is essential.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | High Vacuum Angle Valve (Pneumatic Process Valve) |
| Model Designation | XLA-50-2M9BLA-XANIA |
| Nominal Port Size | 50 mm (NW50 / KF50 compatible flange interface) |
| Operating Pressure Range | High vacuum service (typically 10⁻⁶ to 10⁻⁸ Torr range) |
| Actuation Type | Pneumatic (double-acting or spring-return, per SMC XLA series) |
| Seal Design | Bellows-sealed stem with elastomer bonnet seal for leak-tight isolation |
| Mounting & Connection | ISO-KF / NW flange interface, standard SMC vacuum mounting pattern |
| Body Material | Stainless steel (SUS304/316 equivalent) for corrosion resistance and vacuum compatibility |
| Flow Configuration | Right-angle (90°) body design for compact installation and high conductance |
Engineering Features & Advantages
- Precision Vacuum Isolation: The bellows-sealed stem design ensures hermetic shutoff with minimal outgassing, maintaining system integrity in high-vacuum environments down to 10⁻⁸ Torr.
- Optimized Conductance: The angle-body configuration provides a straight-through flow path that reduces turbulence and maximizes pumping speed, improving overall vacuum system efficiency.
- Pneumatic Actuation Reliability: Fast, repeatable open/close cycles via pneumatic pilot signal, suitable for automated process control and remote operation in cluster tools.
- Industrial Reliability: Constructed from vacuum-grade stainless steel and engineered for continuous operation under severe semiconductor and industrial vacuum conditions.
- Direct Fit Replacement: Exact dimensional and functional compatibility with SMC XLA series mounting and flange standards, ensuring drop-in replacement without modification.
Typical Industrial Applications
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PRODUCT IMAGES
SMC XLA-50-2M9BLA-XANIA High Vacuum Angle Valve
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
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- Peace of Mind: Covered by our 12-Month Replacement Warranty.
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