Product Overview
The VAT 12144-PA24-0001/1494 is a high-precision vacuum isolation valve engineered by VAT Vakuumventile AG, a global leader in vacuum valve technology. This pneumatically actuated valve is designed for reliable isolation and control of gas flow in high-vacuum and process environments. Unlike hydraulic directional or pressure control valves, this unit operates as a process and pneumatic valve, utilizing compressed air for actuation to provide rapid, repeatable sealing cycles. Its robust construction and elastomer sealing technology make it an essential component in semiconductor manufacturing, thin-film deposition, and industrial vacuum systems where contamination-free isolation and long service life are critical.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Process & Pneumatic Valve (Vacuum Isolation Valve) |
| Model Designation | 12144-PA24-0001/1494 |
| Operating Pressure | Vacuum to 2 bar (absolute), Pneumatic Actuation: 4–7 bar |
| Mounting & Connection | Standard ISO-KF / CF Flange Interface |
Engineering Features & Advantages
- Precision Performance: Pneumatic actuation ensures fast, consistent open/close cycles with minimal particle generation, ideal for cleanroom and high-purity vacuum processes.
- Industrial Reliability: Built for continuous operation under severe industrial conditions, with a durable body and high-cycle-life elastomer seals that resist wear and outgassing.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original VAT OEM standards, ensuring drop-in installation without modification.
Typical Industrial Applications
This vacuum valve is commonly used in semiconductor wafer fabrication equipment, physical vapor deposition (PVD) and chemical vapor deposition (CVD) systems, analytical instrumentation and mass spectrometry, and industrial vacuum coating lines. It is also suitable for load-lock chambers, transfer modules, and other high-vacuum process tools requiring reliable isolation and contamination control.
PRODUCT IMAGES

VAT 12144-PA24-0001/1494 Vacuum Valve
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- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
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