Product Overview
The VAT 26434-KE21-CHR1/0049 is a high-precision vacuum isolation valve engineered by VAT, the global leader in vacuum valve technology. Operating on a pneumatically actuated gate valve principle, this component is designed to provide reliable, leak-tight isolation of vacuum lines in demanding process environments. Unlike hydraulic directional or pressure control valves, this unit is specifically configured for vacuum service, utilizing a bellows-sealed or elastomer-sealed gate mechanism to achieve high conductance and minimal particle generation. It serves as a critical isolation point in load-lock chambers, transfer modules, and high-vacuum process lines, ensuring process integrity and protecting sensitive vacuum pumps from atmospheric exposure.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Vacuum Isolation Valve (Pneumatic Gate Valve) |
| Model Designation | 26434-KE21-CHR1/0049 |
| Operating Pressure | Vacuum Service (High Vacuum to 2 bar differential) |
| Mounting & Connection | Standard ISO-K / CF Flange Interface |
| Actuation Method | Pneumatic (Double Acting or Spring Return) |
| Seal Material | Elastomer (Viton/FKM) or Bellows Sealed |
Engineering Features & Advantages
- Precision Vacuum Performance: Engineered for high conductance and leak-tight isolation, maintaining vacuum integrity down to 10-9 mbar ranges depending on seal configuration.
- Industrial Reliability: Built for continuous operation in harsh semiconductor and industrial coating environments, with a robust pneumatic actuator designed for millions of cycles.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original VAT OEM standards, ensuring seamless integration into existing vacuum systems.
- Low Particle Generation: The gate valve mechanism minimizes friction and wear, reducing particulate contamination in sensitive process chambers.
Typical Industrial Applications
This vacuum valve is essential in semiconductor manufacturing equipment (load locks, transfer chambers, and PVD/CVD systems), vacuum coating and metallurgical furnaces, analytical instrumentation (mass spectrometers and electron microscopes), and industrial vacuum packaging lines where reliable isolation of high-vacuum zones is critical for process quality and equipment protection.
PRODUCT IMAGES



VAT 26434-KE21-CHR1/0049 Vacuum Valve
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- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
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- Peace of Mind: Covered by our 12-Month Replacement Warranty.
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