Product Overview
The VAT 28332-GE71-0003/0068 is a high-precision vacuum isolation valve engineered by VAT Group, a global leader in vacuum valve technology. This component operates as a pneumatically actuated process valve designed for reliable shut-off and isolation of vacuum lines in demanding industrial and semiconductor process environments. Unlike hydraulic directional or pressure control valves, this unit is specifically configured for vacuum service, utilizing a pneumatically driven actuator to achieve positive sealing against atmospheric pressure differentials. Its robust construction ensures leak-tight performance, making it an essential component for maintaining process integrity in high-purity and high-vacuum systems.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Vacuum Isolation Valve (Pneumatic Process Valve) |
| Model Designation | VAT 28332-GE71-0003/0068 |
| Operating Pressure | Vacuum Service (Up to 1 bar differential, standard industrial grade) |
| Mounting & Connection | Standard ISO-K / CF Flange Interface (Manufacturer Specific) |
| Actuation Type | Pneumatic (Double Acting or Spring Return) |
| Seal Material | Elastomer / Metal Seal (High Vacuum Compatible) |
Engineering Features & Advantages
- Precision Vacuum Sealing: Engineered with a high-integrity sealing mechanism that ensures leak rates remain below 1×10⁻⁹ mbar·l/s, maintaining critical vacuum levels in sensitive processes.
- Pneumatic Actuation Reliability: The valve utilizes a robust pneumatic actuator providing fast, repeatable open/close cycles with minimal maintenance, ideal for automated process control loops.
- Industrial Reliability: Built for continuous operation under severe industrial conditions, including high cycle rates and exposure to process byproducts, ensuring long service life.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original VAT OEM standards, allowing for seamless integration into existing vacuum systems without modification.
Typical Industrial Applications
This vacuum valve is commonly utilized in semiconductor manufacturing equipment (CVD, PVD, etch chambers), vacuum coating systems, analytical instrumentation (mass spectrometry), and industrial vacuum furnaces. It is also suitable for pharmaceutical freeze-drying processes and high-energy physics research facilities where precise vacuum isolation is critical.
PRODUCT IMAGES

VAT 28332-GE71-0003/0068 Vacuum Valve
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
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