Product Overview
The VAT 612XX-XEGC-AUB1/0001 is a high-vacuum isolation valve engineered by VAT Group, a global leader in vacuum valve technology. This component operates as a pneumatically actuated, bellows-sealed gate valve designed for reliable isolation of high-vacuum and ultra-high-vacuum (UHV) process chambers. Unlike hydraulic pumps, this device functions strictly as a flow control and isolation element within vacuum process systems, providing leak-tight shut-off between the process chamber and the pumping line. Its robust construction and precision sealing mechanism make it an essential component in semiconductor manufacturing, thin-film deposition, and other demanding vacuum environments where contamination control and repeatable sealing performance are critical.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | High-Vacuum Isolation Valve (Pneumatic Gate Valve) |
| Model Designation | 612XX-XEGC-AUB1/0001 |
| Manufacturer | VAT Group |
| Actuation Type | Pneumatic (Double-Acting) |
| Sealing Technology | Bellows-Sealed, Metal-to-Metal or Elastomer Gate Seal |
| Operating Pressure Range | High-Vacuum to UHV (typically 1×10⁻⁹ mbar to 1 bar differential) |
| Mounting & Connection | Standard ISO-K / CF (ConFlat) Flange Interface |
| Body Material | Stainless Steel (AISI 304/316L) |
| Position Indicator | Integrated Visual and/or Electrical Position Feedback |
Engineering Features & Advantages
- Precision Vacuum Sealing: The bellows-sealed gate mechanism ensures hermetic isolation with minimal particle generation, maintaining chamber integrity during critical process cycles.
- Pneumatic Actuation Reliability: Double-acting pneumatic actuator delivers fast, repeatable open/close cycles with consistent sealing force, reducing downtime in automated process lines.
- Contamination-Free Operation: Bellows design isolates the actuator mechanism from the vacuum environment, preventing lubricant migration and particulate contamination.
- Industrial Reliability: Built for continuous operation under severe high-vacuum and UHV conditions, with a service life rated for millions of cycles.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original VAT OEM specifications, ensuring drop-in replacement without modification.
Typical Industrial Applications
This high-vacuum isolation valve is typically deployed in semiconductor wafer fabrication equipment (PVD, CVD, etch chambers), thin-film solar panel production lines, vacuum coating and metall
PRODUCT IMAGES
VAT 612XX-XEGC-AUB1/0001 High-Vacuum Isolation Valve
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
Shop the genuine VAT 612XX-XEGC-AUB1/0001 High-Vacuum Isolation Valve. This Switzerland-made pneumatic hydraulic component features a bellows-sealed design, delivering leak-free, reliable fluid control for heavy-duty industrial systems.