The HORIBA STEC D519MG is a heavy-duty industrial mass flow controller engineered for accurate thermal mass flow measurement and closed-loop control of process gases in semiconductor, vacuum, and analytical systems. It combines a capillary thermal sensor with a fast-response proportional control valve to maintain stable flow independent of line pressure fluctuations.
HORIBA STEC D519MG Technical Specifications
| Parameter | Specification |
|---|---|
| Product Type | Thermal Mass Flow Controller |
| Control Principle | Capillary thermal sensing with proportional valve |
| Valve Actuation | Pneumatic / electromagnetic proportional control |
| Mounting | Inline, standard industrial gas panel |
| Port Connections | Metal face seal or compression fittings |
| Wetted Materials | Stainless steel, corrosion-resistant alloys |
| Operating Media | Process gases, non-corrosive and reactive gases |
| Response | Fast settling for closed-loop flow control |
Key Engineering Features
- Thermal mass flow sensing for direct mass-based measurement without temperature or pressure compensation
- Integrated proportional control valve for stable, repeatable flow setpoint tracking
- Compact inline body suitable for dense gas panel layouts
- High-resolution signal output for process monitoring and feedback
- Robust construction for continuous industrial duty
Industrial Applications
- Semiconductor wafer fabrication gas delivery
- Vacuum process and thin-film deposition systems
- Analytical instrumentation and laboratory gas control
- Industrial gas blending and proportional flow regulation
For technical inquiries, dimensional drawings, or replacement support for HORIBA STEC D519MG, contact the Pro-Hydraulic engineering team.
PRODUCT IMAGES
HORIBA STEC D519MG Mass Flow Controller
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- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
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- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
Shop the HORIBA STEC D519MG Mass Flow Controller. This precision-engineered industrial component delivers reliable performance and tight fluid control for heavy-duty systems.