The MKS INSTRUMENTS 683B-24023 is a heavy-duty industrial vacuum throttle valve engineered for precise pressure and flow control in high-vacuum process systems. It utilizes a motor-driven throttle plate to modulate conductance, maintaining stable chamber pressure without introducing electrical interference into the process environment.
MKS INSTRUMENTS 683B-24023 Technical Specifications
| Manufacturer | MKS Instruments |
| Model | 683B-24023 |
| Product Type | Vacuum Throttle Valve |
| Actuation | Electric Motor / Stepper |
| Valve Action | Throttling / Conductance Control |
| Flange Type | ISO-K / ISO-F (configurable) |
| Body Material | Stainless Steel |
| Seal Material | Viton / Kalrez |
| Leak Rate | < 1 x 10-9 mbar·l/s |
| Operating Temperature | 0 °C to 150 °C |
| Position Feedback | Analog / Digital |
Key Engineering Features
- Motor-driven throttle plate for precise conductance modulation
- High-resolution position control for stable pressure regulation
- Metal-to-metal or elastomer sealing options for UHV compatibility
- Compact, inline design for easy integration into vacuum lines
- Compatible with MKS pressure controllers and process logic
Industrial Applications
- Semiconductor plasma etch and CVD processes
- Physical vapor deposition (PVD) and sputtering systems
- Vacuum coating and surface treatment
- Analytical instrumentation and mass spectrometry
- Research and development high-vacuum chambers
For technical inquiries, dimensional drawings, or replacement support for MKS INSTRUMENTS 683B-24023, contact the Pro-Hydraulic engineering team.
PRODUCT IMAGES


MKS INSTRUMENTS 683B-24023 Vacuum Throttle Valve
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
Shop the MKS INSTRUMENTS 683B-24023 Vacuum Throttle Valve. This precision-engineered industrial component delivers reliable performance and tight fluid control for heavy-duty systems.