Product Overview
The VARIAN L6591307 is a 1.5″ stainless steel high-vacuum isolation valve from the SSV (Stainless Steel Valve) series, engineered for precise vacuum control in demanding process environments. As a pneumatically actuated high-vacuum valve, it operates on a poppet/plate sealing principle to provide reliable open/close isolation between a vacuum chamber and its pumping system. The 1.5″ nominal port size corresponds to a standard ISO-KF or CF flange interface, making it a direct-fit component in modular vacuum networks. Its stainless steel body and elastomer or metal seal construction deliver the chemical resistance and low outgassing performance required for semiconductor, coating, and analytical instrumentation systems.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | High-Vacuum Isolation Valve (Pneumatic) |
| Model Designation | VARIAN L6591307 |
| Nominal Port Size | 1.5″ (DN40) |
| Body Material | Stainless Steel (SSV Series) |
| Actuation Type | Pneumatic (Compressed Air Actuator) |
| Operating Pressure | Standard Industrial Grade (Up to rated bar) |
| Mounting & Connection | Standard ISO-KF / CF Flange Interface |
Engineering Features & Advantages
- Precision Performance: Pneumatic actuation delivers fast, repeatable open/close cycles with positive sealing, minimizing response lag in vacuum pump-down and vent sequences.
- Industrial Reliability: Built for continuous operation under severe industrial conditions, with a stainless steel body resisting corrosion and particulate contamination in aggressive process gas streams.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original OEM standards, including the 1.5″ flange pattern and pneumatic control port configuration.
Typical Industrial Applications
This VARIAN L6591307 high-vacuum valve is typically deployed in semiconductor wafer processing equipment, thin-film deposition and sputtering systems, analytical mass spectrometry and electron microscopy instruments, and industrial vacuum furnace or coating lines where reliable isolation between chamber and pump is critical.
PRODUCT IMAGES
VARIAN L6591307 / 1.5″ SSV H/O Vacuum Valve
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
Shop the genuine VARIAN L6591307 / 1.5″ SSV H/O Solenoid Operated Spool Valve. This German-made hydraulic component features a robust spool design, delivering leak-free, reliable fluid control for heavy-duty industrial systems.