Product Overview
The VAT 0300X-MA24-1006 is a high-precision vacuum isolation valve engineered by VAT, the global leader in vacuum valve technology. Operating on a pneumatically actuated gate valve principle, this component is designed to provide reliable, leak-tight isolation of vacuum chambers and process lines in demanding industrial environments. Unlike hydraulic directional or pressure control valves, this unit is specifically configured for vacuum process isolation, utilizing a bellows-sealed or elastomer-sealed gate mechanism to achieve high conductance when open and ultra-low leak rates when closed. It serves as a critical interface component in semiconductor manufacturing, thin-film deposition, and industrial coating systems, ensuring process integrity by preventing cross-contamination between vacuum zones and protecting sensitive vacuum pumps from sudden pressure surges.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Vacuum Isolation Valve (Pneumatic Gate Valve) |
| Model Designation | VAT 0300X-MA24-1006 |
| Operating Pressure | Vacuum Service (High Vacuum to 2 bar differential) |
| Actuation Type | Pneumatic (Compressed Air), Normally Closed (NC) or Double Acting |
| Mounting & Connection | ISO-K / ISO-F Flange Interface (Standard Vacuum Connection) |
| Seal Material | FKM (Viton) or PTFE Elastomer for High Vacuum Compatibility |
| Leak Rate | < 1 x 10⁻⁹ mbar·l/s (Helium Standard) |
Engineering Features & Advantages
- Precision Vacuum Sealing: The VAT 0300X-MA24-1006 utilizes a precision-machined gate and seat assembly that guarantees repeatable, bubble-tight isolation, preventing atmospheric contamination and maintaining process chamber integrity during critical vacuum cycles.
- Pneumatic Actuation Reliability: Designed for rapid, automated cycling, the pneumatic actuator ensures consistent open/close strokes with minimal vibration, reducing particle generation and extending the service life of the sealing mechanism.
- High Conductance Design: The valve body geometry is optimized to maximize flow conductance in the open position, minimizing pump-down times and ensuring efficient evacuation of process gases.
- Industrial Reliability: Built for continuous operation under severe industrial conditions, the valve features robust construction materials resistant to corrosive process byproducts and thermal cycling.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original VAT OEM standards, ensuring seamless integration into existing vacuum systems without modification to flange interfaces or control wiring.
Typical Industrial Applications
The VAT 0300X-MA24-1006 is widely deployed in high-technology manufacturing environments where vacuum integrity is paramount. Key applications include semiconductor wafer fabrication equipment (PVD, CVD, and etch chambers), flat panel display manufacturing lines, industrial vacuum coating systems for architectural glass and solar panels, and analytical instrumentation such as mass spectrometers and electron microscopes. It is also utilized in pharmaceutical freeze-drying processes and metallurgical vacuum furnaces where reliable isolation between high-vacuum and roughing pump stages is essential for
PRODUCT IMAGES
VAT 0300X-MA24-1006 Vacuum Valve
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
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- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
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