Product Overview
The VAT 0340X-CA24-BMV3/0373 (OEM Reference: A-1422138) is a high-precision vacuum isolation valve engineered by VAT Group, the global benchmark in vacuum valve technology. Operating on a pneumatically actuated, bellows-sealed gate mechanism, this valve is designed to provide reliable, leak-tight isolation between high-vacuum process chambers and roughing/backing lines in demanding industrial environments. Unlike hydraulic directional or pressure control valves, this unit functions strictly as a process isolation component, utilizing compressed air to drive the actuator while maintaining a hermetically sealed vacuum boundary. Its robust construction makes it an essential component in semiconductor manufacturing, thin-film deposition, and industrial coating systems where atmospheric contamination and pressure stability are critical.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Vacuum Isolation Valve (Pneumatic Process Valve) |
| Model Designation | VAT 0340X-CA24-BMV3/0373 / A-1422138 |
| Actuation Method | Pneumatic (Compressed Air), Double-Acting or Spring-Return |
| Valve Mechanism | Gate / Pendulum Isolation with Bellows Seal |
| Operating Pressure Range | High Vacuum to 2 bar (Absolute) Differential |
| Leak Rate (Vacuum) | < 1 x 10⁻⁹ mbar·l/s (Helium Standard) |
| Mounting & Connection | ISO-K / CF Flange Interface (Standard VAT Configuration) |
| Body Material | Stainless Steel (AISI 304/316L) with Elastomer Seals |
Engineering Features & Advantages
- Hermetic Bellows Sealing: The metal bellows design completely isolates the actuator mechanism from the vacuum environment, preventing particulate generation and ensuring ultra-low leak rates essential for UHV processes.
- Pneumatic Precision Actuation: Fast, repeatable open/close cycles driven by standard compressed air, allowing for seamless integration into automated process control loops and PLC systems.
- Vibration & Contamination Resistance: Engineered specifically for process environments, the valve minimizes particle generation and withstands the corrosive byproducts common in etching and CVD applications.
- Direct OEM Compatibility: The A-1422138 reference ensures exact form, fit, and function replacement for existing VAT vacuum systems, eliminating downtime associated with adapter modifications.
Typical Industrial Applications
This VAT vacuum valve is critical in semiconductor fabrication equipment (PVD, CVD, and etch chambers), industrial vacuum coating lines for architectural glass and solar panels, pharmaceutical freeze-drying systems, and research & development high-vacuum laboratories. It serves as
PRODUCT IMAGES
VAT 0340X-CA24-BMV3/0373 / A-1422138 Vacuum Valve
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
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