Product Overview
The VAT 10844-PE24-0005/0029 is a high-precision vacuum isolation valve engineered by VAT Group, the global leader in vacuum valve technology. This component functions as a critical process control element in vacuum-based industrial systems, providing reliable isolation and conductance control between vacuum chambers and process lines. Unlike hydraulic directional or pressure control valves, this unit is specifically designed for vacuum service, utilizing a pneumatically actuated sealing mechanism to achieve leak-tight closure against atmospheric pressure differentials. The valve is typically deployed in semiconductor fabrication, thin-film deposition, and industrial coating environments where contamination-free isolation and repeatable cycling are mandatory.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Vacuum Isolation Valve (Process & Pneumatic Valve) |
| Model Designation | VAT 10844-PE24-0005/0029 |
| Actuation Type | Pneumatic (PE24 series actuator) |
| Operating Pressure | Standard Industrial Grade (vacuum to 2 bar differential) |
| Mounting & Connection | Standard ISO / VAT Flange Interface |
| Leak Rate | < 1 × 10⁻⁹ mbar·l/s (helium) |
| Body Material | Stainless Steel (AISI 304/316 equivalent) |
| Seal Material | FKM / Viton (high-vacuum compatible) |
Engineering Features & Advantages
- Precision Vacuum Sealing: Metal-to-elastomer sealing architecture delivers ultra-low leak rates, maintaining chamber integrity during critical process cycles.
- Pneumatic Actuation Reliability: The PE24 pneumatic actuator ensures rapid, repeatable open/close cycles with minimal particle generation, ideal for cleanroom environments.
- Industrial Reliability: Built for continuous operation under severe vacuum and thermal cycling conditions, with a service life exceeding 1 million cycles.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original VAT 10844 series mounting footprints and pneumatic control interfaces.
- Contamination Resistance: Internal surfaces are electropolished and free of trapped volumes, preventing process gas condensation and particulate accumulation.
Typical Industrial Applications
This vacuum valve is commonly deployed in semiconductor plasma etching and CVD/PVD deposition systems, vacuum coating and sputtering lines, analytical mass spectrometry instruments, and industrial freeze-drying or vacuum metallurgy processes. It is also suitable for load-lock isolation, foreline isolation, and high-vacuum chamber venting in research and production environments.
PRODUCT IMAGES
VAT 10844-PE24-0005/0029 Vacuum Valve
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
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