Product Overview
The ENTEGRIS S/P21MPV00429 is a high purity fluid valve engineered for critical process control in ultra-clean fluid handling systems. Manufactured by Entegris, a global leader in advanced materials and contamination-control solutions, this valve is designed to regulate the flow of high-purity liquids and gases without introducing particulates, extractables, or ionic contamination into the process stream. Unlike conventional industrial hydraulic valves, the S/P21MPV00429 utilizes high-purity polymer and fluoropolymer wetted materials, making it ideally suited for semiconductor, pharmaceutical, and ultra-pure chemical delivery applications where fluid integrity is paramount. Its pneumatic actuation provides rapid, repeatable switching with minimal dead volume, ensuring precise metering and isolation of aggressive or sensitive media.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | High Purity Fluid Valve (Process & Pneumatic Valve) |
| Model Designation | S/P21MPV00429 |
| Manufacturer | Entegris |
| Actuation Type | Pneumatic (Air-Operated) |
| Operating Pressure | Standard Industrial Grade (Up to rated bar) |
| Wetted Materials | High-Purity Fluoropolymer / PFA / PTFE |
| Mounting & Connection | Standard ISO / Manufacturer Interface |
| Media Compatibility | Ultra-Pure Liquids, Gases, Aggressive Chemicals |
Engineering Features & Advantages
- Precision Performance: Pneumatic actuation delivers fast, repeatable open/close cycles with minimal dead volume, ensuring accurate flow control and isolation of high-purity media.
- Ultra-High Purity Construction: Fluoropolymer wetted surfaces minimize particle generation, extractables, and ionic contamination, preserving fluid integrity in critical processes.
- Chemical Resistance: Engineered to withstand aggressive acids, bases, solvents, and reactive chemistries without degradation or leaching.
- Industrial Reliability: Built for continuous operation under severe industrial conditions, with a robust diaphragm or isolation design that prevents actuator fluid cross-contamination.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original OEM standards for seamless integration into existing Entegris fluid handling systems.
Typical Industrial Applications
This high purity fluid valve is commonly deployed in semiconductor wafer fabrication for chemical mechanical planarization (CMP) slurry delivery, in pharmaceutical and biotech processing for sterile fluid transfer, in ultra-pure water and chemical distribution systems for microelectronics manufacturing, and in analytical laboratory instrumentation requiring contamination-free sample handling. Its pneumatic actuation and high-purity wetted path make it equally suitable for aggressive chemical dosing, photoresist dispensing, and high-purity gas cabinet isolation.
PRODUCT IMAGES



ENTEGRIS S/P21MPV00429 High Purity Fluid Valve
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
Shop the genuine ENTEGRIS S/P21MPV00429 Solenoid Directional Control Valve. This US-made hydraulic component features a spool-type design, delivering leak-free, reliable fluid control for heavy-duty industrial systems.