The AERA FC-PAR781CLSHT is a heavy-duty industrial mass flow controller engineered for precise gas delivery in semiconductor and advanced process systems. It combines a thermal or pressure-based sensing element with a fast-acting control valve to maintain accurate flow rates independent of pressure fluctuations.
AERA FC-PAR781CLSHT Technical Specifications
| Parameter | Specification |
|---|---|
| Product Type | Mass Flow Controller (MFC) |
| Flow Range | Model-specific (consult factory) |
| Accuracy | ±1% of setpoint |
| Repeatability | ≤0.2% of full scale |
| Response Time | ≤1 second |
| Operating Pressure | Up to 150 psig |
| Process Connections | Standard VCR or compression fittings |
| Wetted Materials | Stainless steel, elastomer seals |
| Control Valve | Normally closed, proportional |
| Electrical Interface | Analog or digital (model dependent) |
Key Engineering Features
- Precision thermal or pressure-based sensing for stable gas flow
- Fast-acting proportional control valve for rapid setpoint tracking
- High accuracy and repeatability for critical process control
- Compact, modular design for easy integration into gas panels
- Compatible with a wide range of non-corrosive and corrosive gases
Industrial Applications
- Semiconductor manufacturing: CVD, PVD, etch, and diffusion processes
- Thin-film deposition and plasma processing
- Analytical instrumentation and laboratory gas systems
- Pharmaceutical and biotech process gas control
- Industrial coating and surface treatment systems
For technical inquiries, dimensional drawings, or replacement support for AERA FC-PAR781CLSHT, contact the Pro-Hydraulic engineering team.
PRODUCT IMAGES
AERA FC-PAR781CLSHT Mass Flow Controller
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- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
Shop the AERA FC-PAR781CLSHT Mass Flow Controller. This precision-engineered industrial component delivers reliable performance and tight fluid control for heavy-duty systems.