The APPLIED MATERIALS 0040-97162 is a heavy-duty industrial high vacuum gate valve engineered for reliable isolation and conductance control in semiconductor process and vacuum systems. It utilizes a pneumatically actuated gate mechanism with a linear stroke to provide tight sealing and minimal particle generation in high-vacuum environments.
APPLIED MATERIALS 0040-97162 Technical Specifications
| Manufacturer | APPLIED MATERIALS |
| Model | 0040-97162 |
| Product Type | High Vacuum Gate Valve |
| Actuation | Pneumatic (double-acting or spring-return) |
| Valve Mechanism | Linear gate with elastomer or metal seal |
| Mounting Standard | ISO-K / ISO-F or CF flange compatible |
| Body Material | Stainless Steel (typical) |
| Seal Material | Viton / Kalrez / Metal (application dependent) |
| Leak Rate | < 1 x 10-9 mbar·l/s (He) |
| Operating Temperature | Up to 150°C (depending on seal) |
| Application | Semiconductor, vacuum coating, load locks |
Key Engineering Features
- Pneumatic actuation for rapid, repeatable cycling in automated vacuum processes.
- Gate design minimizes turbulence and particle entrapment, ensuring high conductance.
- Robust stainless steel body and precision-machined sealing surfaces for extended service life.
- Compatible with standard high-vacuum flange interfaces for drop-in replacement.
- Designed for high-cycle applications with minimal maintenance.
Industrial Applications
- Semiconductor manufacturing equipment (etch, CVD, PVD).
- Vacuum load locks and transfer chambers.
- Thin-film deposition systems.
- Analytical instruments and surface science equipment.
- Industrial vacuum coating and metallizing lines.
For technical inquiries, dimensional drawings, or replacement support for APPLIED MATERIALS 0040-97162, contact the Pro-Hydraulic engineering team.
PRODUCT IMAGES
APPLIED MATERIALS 0040-97162 High Vacuum Gate Valve
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- Peace of Mind: Covered by our 12-Month Replacement Warranty.
Shop the APPLIED MATERIALS 0040-97162 High Vacuum Gate Valve. This precision-engineered industrial component delivers reliable performance and tight fluid control for heavy-duty systems.