Product Overview
The Brooks Instrument GF-120C-EXJX0965 (also designated GF120C-912548) is a high-precision thermal mass flow controller engineered for accurate measurement and closed-loop regulation of gas flow in demanding industrial and process environments. Utilizing Brooks Instrument’s proven thermal capillary sensing technology, this controller delivers stable, repeatable flow control independent of temperature and pressure fluctuations. The GF-120C series is a benchmark in semiconductor, analytical, and industrial gas delivery systems, offering fast response, excellent zero stability, and long-term reliability. This unit is configured for integration into automated process lines where precise gas metering is critical to product quality and process safety.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Mass Flow Controller (Thermal) |
| Model Designation | GF-120C-EXJX0965 / GF120C-912548 |
| Manufacturer | Brooks Instrument |
| Operating Pressure | Standard Industrial Grade (Up to rated bar) |
| Mounting & Connection | Standard ISO / Manufacturer Interface |
| Flow Sensing Principle | Thermal capillary bypass sensor with precision control valve |
| Control Output | Analog / Digital (dependent on configuration) |
Engineering Features & Advantages
- Precision Performance: Advanced thermal sensing delivers highly accurate gas mass flow measurement and control, unaffected by line pressure or temperature variations.
- Fast Response & Stability: Closed-loop control architecture ensures rapid settling times and excellent zero stability for repeatable process results.
- Industrial Reliability: Built for continuous operation under severe industrial conditions, with robust construction and high-quality wetted materials.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original OEM standards, simplifying retrofit and maintenance.
Typical Industrial Applications
This mass flow controller is widely used in semiconductor fabrication (CVD, etch, diffusion), analytical instrumentation and laboratory gas systems, industrial coating and thin-film deposition, and precision gas blending for chemical and petrochemical processes. It is also suitable for fuel cell testing, pharmaceutical manufacturing, and any application requiring accurate, repeatable gas flow control.
PRODUCT IMAGES




BROOKS INSTRUMENT GF-120C-EXJX0965 / GF120C-912548 Mass Flow Controller
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
Shop the genuine BROOKS INSTRUMENT GF-120C-EXJX0965 / GF120C-912548 Mass Flow Controller. This USA-made precision instrument features a thermal mass flow sensing design, delivering accurate, repeatable gas flow control for critical industrial processes.