The FUJIKIN FP-UBF-916-6.35 is a heavy-duty industrial high purity gas valve engineered for ultra-clean gas delivery in semiconductor and vacuum process systems. Its 6.35 mm (1/4 in) tube connection and metal-to-metal diaphragm seal provide leak-tight isolation with minimal dead volume and particle generation.
FUJIKIN FP-UBF-916-6.35 Technical Specifications
| Parameter | Specification |
|---|---|
| Product Type | High Purity Gas Valve |
| Connection Size | 6.35 mm (1/4 in) tube |
| Body Material | Stainless Steel 316L |
| Seal Type | Metal diaphragm, non-elastomer |
| Actuation | Manual / Pneumatic (model dependent) |
| Max Operating Pressure | Up to 1.0 MPa (145 psi) |
| Leak Rate | < 1 x 10^-9 Pa·m³/s He |
| Surface Finish | Ra < 0.25 µm (internal wetted) |
| Temperature Range | -10 to 80 °C |
Key Engineering Features
- Metal diaphragm design eliminates elastomer outgassing and particle entrapment.
- Compact body with 6.35 mm tube ends for direct orbital welding or compression fitting.
- High cycle life with consistent shutoff torque and repeatable sealing.
- Cleaned and packaged for high purity gas service (UHP compatible).
Industrial Applications
- Semiconductor manufacturing: gas cabinets, VMBs, and process tool lines.
- Vacuum systems requiring leak-tight isolation of reactive or inert gases.
- Analytical instrumentation and R&D gas delivery panels.
- Pharmaceutical and biotech high purity gas distribution.
For technical inquiries, dimensional drawings, or replacement support for FUJIKIN FP-UBF-916-6.35, contact the Pro-Hydraulic engineering team.
PRODUCT IMAGES
FUJIKIN FP-UBF-916-6.35 High Purity Gas Valve
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- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
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- Peace of Mind: Covered by our 12-Month Replacement Warranty.
Shop the FUJIKIN FP-UBF-916-6.35 High Purity Gas Valve. This precision-engineered industrial component delivers reliable fluid control for heavy-duty systems.