Product Overview
The HORIBA SEF-Z531KX is a precision-engineered mass flow controller (MFC) designed for accurate measurement and regulation of gas flow in advanced industrial and semiconductor process systems. As a member of HORIBA’s SEF series, this instrument combines a high-sensitivity thermal flow sensor with a fast-response proportional control valve to deliver stable, repeatable flow control across a wide dynamic range. The SEF-Z531KX operates on the principle of differential thermal conductivity measurement, where the gas stream passes over a heated capillary sensor element, generating a signal proportional to mass flow rate. This signal is continuously compared against the operator-set command value, and the integrated control valve modulates its orifice to maintain the desired setpoint with minimal overshoot and rapid settling time. The device is particularly suited for processes requiring precise gas delivery, such as chemical vapor deposition, plasma etching, and reactive sputtering, where flow stability directly impacts film uniformity and process yield. Its compact, modular architecture allows for straightforward integration into gas panels and manifold systems, while the corrosion-resistant wetted materials ensure compatibility with a broad range of process gases, including reactive and toxic species.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Mass Flow Controller (Process & Pneumatic Valve) |
| Model Designation | SEF-Z531KX |
| Operating Pressure | Standard Industrial Grade (Up to rated bar, typical 0–3 MPa differential) |
| Mounting & Connection | Standard ISO / Manufacturer Interface (VCR or Swagelok-compatible fittings) |
| Flow Range | Model-dependent, typically 10 SCCM to 50 SLM (N₂ equivalent) |
| Accuracy | ±1% of setpoint (typical, at calibration conditions) |
| Response Time | ≤ 1 second (typical, within 2% of final value) |
| Control Valve Type | Normally-closed proportional solenoid valve |
| Wetted Materials | Stainless steel 316L, PTFE, Viton (or equivalent) |
| Electrical Interface | 0–5 VDC or 4–20 mA analog command/feedback |
Engineering Features & Advantages
- Precision Performance: Advanced thermal sensor and closed-loop control algorithm deliver high accuracy and repeatability, ensuring stable gas delivery for critical process steps.
- Industrial Reliability: Constructed for continuous duty with durable, corrosion-resistant materials and proven engineering for maximum system uptime.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original HORIBA standards, allowing straightforward retrofit into existing hydraulic systems without rework.
Typical Industrial Applications
The device is particularly suited for processes requiring precise gas delivery, such as chemical vapor deposition, plasma etching, and reactive sputtering, where flow stability directly impacts film uniformity and process yield.
PRODUCT IMAGES
HORIBA SEF-Z531KX Mass Flow Controller
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- Peace of Mind: Covered by our 12-Month Replacement Warranty.
Shop the genuine HORIBA SEF-Z531KX Solenoid Directional Control Valve. This Japan-made hydraulic component features a spool-type design, delivering leak-free, reliable fluid control for heavy-duty industrial systems.