Product Overview
The HORIBA STEC D514MG is a high-precision mass flow controller (MFC) engineered for accurate measurement and regulation of gas flow in demanding process environments. As a member of the HORIBA STEC D500 series, this instrument utilizes a thermal sensor-based measurement principle combined with a fast-response proportional control valve to deliver stable, repeatable flow control across a wide dynamic range. The D514MG is designed for integration into semiconductor fabrication tools, thin-film deposition systems, and other advanced industrial processes where precise gas delivery is critical to product quality and process reproducibility. Its compact footprint and robust construction make it suitable for both new equipment installations and drop-in replacement of existing mass flow controllers.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Mass Flow Controller (Process & Pneumatic Valve) |
| Model Designation | D514MG |
| Manufacturer | HORIBA STEC |
| Operating Pressure | Standard Industrial Grade (Up to rated bar) |
| Mounting & Connection | Standard ISO / Manufacturer Interface |
| Control Principle | Thermal sensing with proportional solenoid-actuated control valve |
| Flow Range | Model-dependent (consult factory for specific full-scale range) |
| Response Time | Fast-response design for dynamic process control |
Engineering Features & Advantages
- Precision Performance: Thermal mass flow sensing delivers accurate, repeatable gas flow measurement independent of temperature and pressure fluctuations, ensuring consistent process results.
- Fast-Acting Control Valve: Integrated proportional control valve provides rapid response to setpoint changes, minimizing overshoot and stabilizing flow during transient process conditions.
- Industrial Reliability: Built for continuous operation under severe industrial conditions, with robust construction that withstands the demands of 24/7 fabrication environments.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original OEM standards, enabling straightforward drop-in replacement without system redesign.
- Wide Dynamic Range: Maintains accurate control across a broad flow range, supporting both low-flow and high-flow process steps with a single device.
Typical Industrial Applications
The HORIBA STEC D514MG mass flow controller is widely deployed in semiconductor wafer fabrication equipment, including chemical vapor deposition (CVD) and plasma etching tools where precise gas ratios are essential. It is also used in thin-film deposition and sputtering systems, where controlled delivery of process gases directly influences film uniformity and quality. Additional applications include analytical instrumentation, R&D laboratory gas delivery systems, and industrial processes requiring accurate pneumatic flow regulation such as optical coating and surface treatment operations.
PRODUCT IMAGES
HORIBA STEC D514MG Mass Flow Controller
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- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
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- Peace of Mind: Covered by our 12-Month Replacement Warranty.
Shop the genuine HORIBA STEC D514MG Mass Flow Controller Valve. This Japan-made precision flow control component features a normally closed solenoid design, delivering leak-free, reliable fluid control for heavy-duty industrial systems.