Product Overview
The HORIBA STEC SEC-E40 is a high-precision mass flow controller (MFC) engineered for accurate measurement and closed-loop regulation of gas flow in demanding process environments. As a member of the HORIBA STEC SEC-E40 series, this instrument combines a thermal or differential-pressure sensing element with an integrated proportional control valve, delivering stable, repeatable flow control across a wide dynamic range. The SEC-E40 is widely deployed in semiconductor fabrication, thin-film deposition, and precision industrial gas delivery systems where exact flow metering is critical to process yield and product quality. Its compact footprint, fast response time, and multi-gas calibration capability make it a preferred choice for OEM and retrofit installations alike.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Mass Flow Controller (Process & Pneumatic Valve) |
| Model Designation | SEC-E40 |
| Manufacturer | HORIBA STEC |
| Operating Pressure | Standard Industrial Grade (Up to rated bar) |
| Mounting & Connection | Standard ISO / Manufacturer Interface |
| Control Principle | Integrated proportional control valve with closed-loop feedback |
| Flow Sensing | Thermal / differential-pressure mass flow sensing element |
| Response Time | Fast-response closed-loop regulation (sub-second class) |
| Gas Compatibility | Multi-gas calibrated; compatible with common process and inert gases |
Engineering Features & Advantages
- Precision Performance: Closed-loop mass flow control with high accuracy and repeatability, ensuring stable gas delivery for critical process steps.
- Fast Dynamic Response: Integrated proportional valve and sensing element deliver rapid setpoint tracking and minimal overshoot.
- Multi-Gas Capability: Factory or field calibration for a range of process gases, reducing spare-part inventory and simplifying system design.
- Industrial Reliability: Built for continuous operation under severe industrial conditions, with robust construction suited to 24/7 process environments.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original OEM standards, enabling drop-in replacement without system modification.
Typical Industrial Applications
The HORIBA STEC SEC-E40 mass flow controller is typically deployed in semiconductor wafer fabrication (CVD, PVD, etch, and diffusion processes), thin-film solar and flat-panel display manufacturing, precision industrial gas blending and delivery systems, and analytical instrumentation requiring accurate gas flow regulation. It is also used in research and pilot-scale process development where repeatable, traceable flow control is essential.
PRODUCT IMAGES
HORIBA STEC SEC-E40 Mass Flow Controller
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
Shop the genuine HORIBA STEC SEC-E40 Mass Flow Controller. This Japan-made precision gas control component features a thermal sensor design, delivering accurate, repeatable flow measurement for industrial process automation.