Product Overview
The INFICON VSM063-AA (Part Number 253-030) is a precision-engineered vacuum isolation valve designed for high-integrity vacuum process control in demanding industrial and scientific environments. Manufactured by INFICON, a global leader in vacuum instrumentation and leak detection technology, this valve operates as a pneumatically actuated, bellows-sealed isolation component within the broader family of process and pneumatic valves. The VSM063-AA serves as a critical vacuum line shut-off element, providing reliable sealing and rapid actuation for vacuum systems requiring contamination-free operation and precise pressure isolation. Its 63 mm nominal flange size (DN 63) makes it suitable for medium-to-high conductance vacuum lines in semiconductor, coating, and analytical instrumentation applications.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Process & Pneumatic Valve (Vacuum Isolation Valve) |
| Model Designation | VSM063-AA / 253-030 |
| Manufacturer | INFICON |
| Nominal Flange Size | DN 63 ISO-KF / ISO-K (63 mm) |
| Actuation Type | Pneumatic (Compressed Air Actuated) |
| Sealing Principle | Bellows-Sealed, Metal-to-Metal or Elastomer Seat |
| Operating Pressure Range | Vacuum to 1.5 bar (absolute) / Standard Industrial Grade |
| Leak Rate | < 1 × 10⁻⁹ mbar·L/s (Helium) |
| Mounting & Connection | ISO-K Flange Interface / Standard Vacuum Fitting |
| Body Material | Stainless Steel (AISI 304/316L) |
| Pneumatic Supply Pressure | 4 – 7 bar (typical) |
Engineering Features & Advantages
- Precision Vacuum Sealing: The bellows-sealed design ensures hermetic isolation with an ultra-low leak rate, preventing atmospheric contamination and maintaining process purity in high-vacuum environments.
- Industrial Reliability: Designed for dependable long-term operation in demanding industrial environments, with quality bearings and sealing systems ensuring extended maintenance intervals.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original INFICON standards, allowing straightforward retrofit into existing hydraulic systems without rework.
Typical Industrial Applications
Its 63 mm nominal flange size (DN 63) makes it suitable for medium-to-high conductance vacuum lines in semiconductor, coating, and analytical instrumentation applications.
PRODUCT IMAGES
INFICON VSM063-AA / 253-030 Vacuum Valve
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
Shop the genuine INFICON VSM063-AA / 253-030 Solenoid Directional Seat Valve. This German-made hydraulic component features a robust poppet design, delivering leak-free, reliable fluid control for heavy-duty industrial systems.