Product Overview
The MDC KAV-150-P-10 (Part No. 311074-1002) is a high-precision pneumatic vacuum angle valve engineered by MDC Vacuum Products for demanding process environments requiring reliable isolation and conductance control. Operating on a pneumatically actuated bellows-sealed mechanism, this angle valve provides straight-through or right-angle flow paths optimized for vacuum service. Its robust construction ensures leak-tight performance in high-vacuum and ultra-high-vacuum (UHV) systems, making it an essential component for semiconductor manufacturing, thin-film deposition, and research applications where contamination control and repeatable cycling are critical.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Pneumatic Vacuum Angle Valve |
| Model Designation | KAV-150-P-10 / 311074-1002 |
| Operating Pressure | Pneumatic Actuation: 60–100 PSIG (4–7 bar) control air |
| Mounting & Connection | KF/NW or CF flange interface (ISO-KF / ISO-CF compatible) |
| Valve Body Material | Stainless Steel (304/316L) |
| Seal Material | Viton / Kalrez elastomer or metal bonnet seal |
| Leak Rate | < 1 × 10⁻⁹ std cc/sec He (typical) |
| Actuation Type | Double-acting or spring-return pneumatic cylinder |
Engineering Features & Advantages
- Precision Performance: Bellows-sealed stem design eliminates particle generation and ensures repeatable, leak-tight isolation over millions of cycles, critical for contamination-sensitive vacuum processes.
- Industrial Reliability: Constructed from high-grade stainless steel with robust pneumatic actuation, built for continuous operation under severe vacuum and thermal cycling conditions.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original MDC KAV series valves, ensuring drop-in replacement without system modification.
- Optimized Conductance: Angle body design provides high pumping speed and uniform flow characteristics, reducing cycle times in load-lock and transfer chambers.
- Cleanroom Compatible: Low outgassing materials and precision machining meet UHV and semiconductor fabrication standards.
Typical Industrial Applications
This pneumatic vacuum angle valve is widely deployed in semiconductor wafer fabrication equipment (PVD, CVD, etch), thin-film solar panel production lines, high-vacuum coating systems for optical and architectural glass, and analytical instrumentation such as mass spectrometers and electron microscopes. It is also suitable for research laboratories and industrial vacuum furnaces requiring precise, automated vacuum isolation.
PRODUCT IMAGES
MDC KAV-150-P-10 / 311074-1002 Pneumatic Vacuum Angle Valve
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
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