Product Overview
The MKS 100016770 is a precision mass flow controller (MFC) engineered by MKS Instruments, a global leader in advanced process control instrumentation. Operating on a thermal mass flow sensing principle, this device delivers accurate, repeatable measurement and closed-loop control of gas flow in vacuum and atmospheric process lines. Unlike hydraulic fluid power valves, the MKS 100016770 is a process and pneumatic control valve designed for semiconductor, thin-film, and industrial gas delivery systems, where precise volumetric or mass-based flow regulation is critical. Its integrated control electronics and proportional valve actuator provide fast response and stable setpoint tracking, making it a direct-fit replacement for OEM gas panels and process tools.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Process & Pneumatic Valve (Mass Flow Controller) |
| Model Designation | 100016770 |
| Manufacturer | MKS Instruments |
| Operating Pressure | Standard Industrial Grade (Up to rated process pressure) |
| Mounting & Connection | Standard ISO / Manufacturer Interface (VCR or equivalent process fittings) |
| Control Principle | Thermal mass flow sensing with closed-loop proportional valve actuation |
| Actuation | Electromagnetic proportional solenoid valve |
Engineering Features & Advantages
- Precision Performance: Thermal mass flow sensing delivers accurate, gas-independent flow measurement and stable closed-loop control for critical process recipes.
- Industrial Reliability: Built for continuous operation under severe process conditions, including corrosive and high-purity gas environments.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original OEM MKS mass flow controller standards.
- Fast Response: Proportional solenoid actuation enables rapid setpoint tracking and minimal overshoot during process transitions.
Typical Industrial Applications
Semiconductor wafer fabrication and thin-film deposition equipment, plasma etching and CVD/PVD process gas delivery, industrial vacuum coating systems, and precision gas blending and analytical instrumentation panels.
PRODUCT IMAGES
MKS 100016770 Mass Flow Controller
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
Shop the genuine MKS 100016770 Solenoid Directional Control Valve. This German-made hydraulic component features a robust spool design, delivering leak-free, reliable fluid control for heavy-duty industrial systems.