Product Overview
The MKS 162-0040K Exhaust Throttle Valve is a precision-engineered flow control component designed for accurate regulation of exhaust gas streams in vacuum and process systems. Manufactured by MKS Instruments, a global leader in vacuum and pressure measurement and control solutions, this valve operates on a manual throttling principle, allowing operators to precisely adjust conductance and maintain stable process pressure. Its robust construction and fine adjustment capability make it an essential component in semiconductor processing, thin-film deposition, and industrial vacuum systems where precise exhaust flow management is critical.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Exhaust Throttle Valve / Process & Pneumatic Valve |
| Model Designation | MKS 162-0040K |
| Operating Pressure | Standard Industrial Grade (Up to rated bar) |
| Mounting & Connection | Standard ISO / Manufacturer Interface |
| Actuation Type | Manual Throttle Adjustment |
| Body Material | Stainless Steel (Corrosion-Resistant) |
| Seal Material | Viton / PTFE (High Vacuum Compatible) |
| Leak Rate | < 1 × 10⁻⁹ std cc/sec He |
Engineering Features & Advantages
- Precision Performance: Fine-thread manual adjustment mechanism enables accurate, repeatable conductance control for stable process pressure regulation.
- Industrial Reliability: Built for continuous operation under severe industrial conditions, with corrosion-resistant stainless steel construction and high-vacuum-compatible sealing.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original OEM standards, ensuring drop-in installation without system modification.
- Low Particle Generation: Designed to minimize contamination in sensitive vacuum environments, ideal for semiconductor and thin-film processes.
- Thermal Stability: Maintains consistent performance across a wide operating temperature range, ensuring reliable throttling in demanding process conditions.
Typical Industrial Applications
This exhaust throttle valve is commonly employed in semiconductor fabrication equipment for chamber pressure control, thin-film deposition systems (PVD, CVD, ALD) for precise vacuum regulation, industrial vacuum furnaces and metallurgical processing where controlled exhaust flow is essential, and analytical instrumentation such as mass spectrometers and electron microscopes requiring stable vacuum conditions. It is also suitable for plasma etching and reactive ion etching systems, as well as general high-vacuum process lines in research and production environments.
PRODUCT IMAGES
MKS 162-0040K Exhaust Throttle Valve
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
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