Product Overview
The MKS 253B-31797 is a precision exhaust throttle valve engineered for accurate pressure and flow control in vacuum and process gas delivery systems. Manufactured by MKS Instruments, a global leader in vacuum and process control instrumentation, this valve is designed to modulate exhaust conductance downstream of a process chamber, enabling stable pressure regulation across a wide dynamic range. Unlike hydraulic directional or pressure control valves, the 253B series operates as a throttling device that adjusts the effective pumping speed by varying the orifice between the chamber and the vacuum pump. Its robust construction and fine actuation resolution make it an essential component in semiconductor fabrication, thin-film deposition, and other critical vacuum processes where precise pressure control is mandatory.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Exhaust Throttle Valve (Process & Pneumatic Valve) |
| Model Designation | MKS 253B-31797 |
| Operating Pressure | Vacuum to low positive pressure (application-dependent, typically ≤ 2 bar differential) |
| Mounting & Connection | Standard ISO KF / CF flange interface (per MKS 253B series) |
| Actuation Type | Motorized / proportional throttle actuator with position feedback |
| Body Material | Stainless steel (corrosion-resistant, vacuum-compatible) |
| Seal Material | Viton / Kalrez elastomer (high vacuum compatible) |
| Control Signal | Analog 0–10 V or 4–20 mA (typical for 253B series) |
Engineering Features & Advantages
- Precision Throttling Performance: Fine-resolution actuator enables smooth, repeatable adjustment of exhaust conductance, maintaining stable chamber pressure even during rapid process transients.
- Vacuum-Optimized Construction: Stainless steel body and high-vacuum-compatible elastomer seals minimize outgassing and particle generation, ensuring process purity.
- Industrial Reliability: Built for continuous operation in demanding vacuum environments, with robust motorized actuation and position feedback for closed-loop control.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original MKS 253B series interfaces, simplifying retrofit and maintenance.
- Wide Dynamic Range: Capable of controlling pressure from rough vacuum to high vacuum, suitable for diverse process recipes.
Typical Industrial Applications
The MKS 253B-31797 exhaust throttle valve is widely used in semiconductor plasma etch and CVD systems, physical vapor deposition (PVD) tools, vacuum furnaces and metallurgical processing, and analytical instrumentation such as mass spectrometers. It is also found in freeze-drying and pharmaceutical lyophilization equipment, where precise vacuum control is critical for product quality. Its ability to modulate exhaust flow makes it indispensable in any process requiring stable pressure regulation downstream of a vacuum
PRODUCT IMAGES
MKS 253B-31797 Exhaust Throttle Valve
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