Product Overview
The MKS 653B-10-250-2 is a precision exhaust throttle valve engineered by MKS Instruments for accurate flow control in vacuum and process gas lines. Operating as a downstream throttling element, it regulates system pressure by modulating the conductance of the exhaust path between the process chamber and the vacuum pump. The valve features a compact, corrosion-resistant body with a KF-style flange interface, making it suitable for semiconductor, thin-film, and general industrial vacuum systems requiring stable pressure regulation and repeatable flow characteristics.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Exhaust Throttle Valve (Process & Pneumatic Valve) |
| Model Designation | 653B-10-250-2 |
| Manufacturer | MKS Instruments |
| Flange Size | Nominal 10 (KF/NW 10 compatible interface) |
| Operating Pressure | Standard Industrial Grade (vacuum to low positive pressure service) |
| Mounting & Connection | Standard ISO / Manufacturer Interface (KF flange) |
| Body Material | Corrosion-resistant stainless steel / aluminum alloy construction |
| Seal Material | Fluoroelastomer (FKM) O-ring seals |
| Adjustment Type | Manual throttling with lockable position |
Engineering Features & Advantages
- Precision Flow Control: Fine-thread throttling mechanism enables accurate, repeatable adjustment of exhaust conductance for stable chamber pressure regulation.
- Leak-Tight Sealing: High-quality FKM O-ring seals ensure minimal leak rate and reliable vacuum integrity during continuous operation.
- Corrosion-Resistant Construction: Stainless steel and aluminum wetted components resist aggressive process gases and extend service life in demanding environments.
- Compact KF Flange Design: Lightweight, space-saving form factor simplifies installation and retrofitting into existing vacuum lines.
- Industrial Reliability: Built for continuous operation under severe industrial conditions with minimal maintenance requirements.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original OEM standards for drop-in service.
Typical Industrial Applications
The MKS 653B-10-250-2 exhaust throttle valve is widely deployed in semiconductor wafer processing equipment, thin-film deposition and etching systems, vacuum coating and sputtering lines, and general industrial vacuum process systems where precise downstream pressure control is essential. It is also suitable for analytical instrumentation, R&D vacuum test benches, and other process environments requiring dependable exhaust throttling performance.
PRODUCT IMAGES
MKS 653B-10-250-2 Exhaust Throttle Valve
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- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
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- Peace of Mind: Covered by our 12-Month Replacement Warranty.
Shop the genuine MKS 653B-10-250-2 High-Pressure Solenoid Valve. This USA-made 250 VDC hydraulic component features a 2-way normally closed design, delivering leak-free, reliable fluid control for heavy-duty industrial systems.