Product Overview
The MKS 653B-8-200-2 is a precision exhaust throttle valve engineered by MKS Instruments for accurate flow control in vacuum and process gas delivery systems. Operating as a downstream throttling element, this valve modulates the conductance of the exhaust path to regulate chamber pressure, making it an essential component in closed-loop pressure control architectures. Its robust construction and fine adjustment capability ensure stable, repeatable performance in demanding semiconductor, thin-film, and industrial vacuum processes.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Exhaust Throttle Valve (Process & Pneumatic Valve) |
| Model Designation | 653B-8-200-2 |
| Manufacturer | MKS Instruments |
| Valve Function | Exhaust line throttling / downstream pressure regulation |
| Actuation | Manual / motorized throttle adjustment (per model configuration) |
| Mounting & Connection | Standard ISO / Manufacturer Interface (KF/CF flange options per series) |
| Operating Pressure | Standard Industrial Grade (Up to rated bar) |
Engineering Features & Advantages
- Precision Performance: Fine-resolution throttling mechanism enables accurate conductance control for stable chamber pressure regulation.
- Industrial Reliability: Built for continuous operation under severe industrial conditions, with materials selected for vacuum and process gas compatibility.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original OEM standards, ensuring drop-in replacement without system modification.
Typical Industrial Applications
Commonly deployed in semiconductor plasma etch and CVD/PVD process chambers, vacuum coating and thin-film deposition systems, analytical instrumentation and mass spectrometry platforms, and general industrial vacuum process lines requiring precise exhaust pressure control.
PRODUCT IMAGES
MKS 653B-8-200-2 Exhaust Throttle Valve
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
Shop the genuine MKS 653B-8-200-2 Solenoid Directional Control Valve. This German-made hydraulic component features a robust spool design, delivering leak-free, reliable fluid control for heavy-duty industrial systems.