Product Overview
The MKS 99J0384 is a precision mass flow controller (MFC) engineered by MKS Instruments, a global leader in advanced process control instrumentation. Operating on a thermal mass flow sensing principle, this device delivers accurate, repeatable measurement and closed-loop control of gas flow in vacuum and pressure-based process systems. Unlike hydraulic fluid power components, the 99J0384 is a pneumatic process control valve that regulates gas mass flow rate directly, making it an essential component in semiconductor fabrication, thin-film deposition, and high-purity industrial gas delivery systems where precise flow metering is critical to process yield and repeatability.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Mass Flow Controller (Process & Pneumatic Valve) |
| Model Designation | MKS 99J0384 |
| Operating Pressure | Standard Industrial Grade (Up to rated process pressure) |
| Mounting & Connection | Standard ISO / Manufacturer Interface |
| Flow Sensing Principle | Thermal mass flow measurement with closed-loop control |
| Control Valve Actuation | Proportional solenoid with integrated feedback |
| Media Compatibility | High-purity and industrial process gases |
Engineering Features & Advantages
- Precision Performance: Thermal mass flow sensing delivers direct mass flow measurement independent of gas temperature and pressure fluctuations, ensuring accurate setpoint tracking and repeatable process control.
- Fast Response Actuation: The integrated proportional solenoid valve provides rapid, stable response to setpoint changes, minimizing overshoot and settling time in dynamic process cycles.
- Industrial Reliability: Built for continuous operation under severe industrial conditions, with robust construction suited to high-cycle process environments.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original OEM standards, enabling drop-in replacement without system modification.
Typical Industrial Applications
The MKS 99J0384 mass flow controller is deployed in semiconductor wafer fabrication equipment, thin-film deposition and etch process chambers, high-purity industrial gas delivery and blending systems, and analytical instrumentation requiring precise gas flow regulation. It is also used in vacuum process control, R&D laboratory gas metering, and specialty coating systems where accurate mass flow control directly impacts process quality and repeatability.
PRODUCT IMAGES
MKS 99J0384 Mass Flow Controller
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
Shop the genuine MKS 99J0384 Solenoid Directional Control Valve. This German-made 24V DC hydraulic component features a spool-type design, delivering leak-free, reliable fluid control for heavy-duty industrial systems.