The MKS DLT2A2131A2P120 is a heavy-duty industrial mass flow controller engineered for precise gas delivery in semiconductor, vacuum, and process systems. It utilizes a thermal-based sensing element and an integrated control valve to maintain accurate flow rates independent of pressure fluctuations.
MKS DLT2A2131A2P120 Technical Specifications
| Manufacturer | MKS Instruments |
| Model | DLT2A2131A2P120 |
| Product Type | Mass Flow Controller (MFC) |
| Flow Range | Typically 0–1000 sccm (dependent on gas and calibration) |
| Accuracy | ±1% of set point |
| Repeatability | ±0.2% of full scale |
| Control Valve | Normally closed solenoid valve |
| Wetted Materials | 316L stainless steel, Viton, PTFE |
| Operating Pressure | Up to 150 psig |
| Leak Integrity | 1 x 10-9 atm·cc/sec He |
| Electrical Connection | 15-pin D-sub connector |
| Mounting | Inline, standard 1/4″ VCR or Swagelok fittings |
Key Engineering Features
- Thermal mass flow sensing with fast response and high stability
- Integrated normally closed solenoid valve for fail-safe shutoff
- Metal-sealed sensor and valve for corrosive and high-purity gases
- Wide dynamic range with precise set point control
- Compatible with MKS power supply and readout modules
Industrial Applications
- Semiconductor wafer fabrication – CVD, PVD, etch, and diffusion
- Vacuum coating and thin-film deposition systems
- Analytical instrumentation and gas chromatography
- Pharmaceutical and biotech process gas control
- Research and development laboratories
For technical inquiries, dimensional drawings, or replacement support for MKS DLT2A2131A2P120, contact the Pro-Hydraulic engineering team.
PRODUCT IMAGES
MKS DLT2A2131A2P120 Mass Flow Controller
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
Shop the MKS DLT2A2131A2P120 Mass Flow Controller. This precision-engineered industrial component delivers reliable fluid control for heavy-duty systems.