The MKS GE50A-30352 is a heavy-duty industrial mass flow controller engineered for accurate gas flow measurement and control in semiconductor, vacuum, and process systems. It utilizes a thermal-based sensing element and an integrated control valve to maintain stable flow rates independent of pressure fluctuations.
MKS GE50A-30352 Technical Specifications
| Parameter | Specification |
|---|---|
| Product Type | Mass Flow Controller (MFC) |
| Model | GE50A-30352 |
| Flow Range | Typically 0–50 sccm (dependent on gas and configuration) |
| Accuracy | ±1% of full scale |
| Repeatability | ±0.5% of full scale |
| Control Valve | Normally closed solenoid valve |
| Mounting | Standard industrial flange or VCR fittings |
| Electrical Interface | 0–5 VDC or 4–20 mA analog, with digital communication options |
Key Engineering Features
- Thermal mass flow sensing for precise gas control
- Integrated normally closed solenoid valve for fail-safe operation
- Fast response time and high repeatability
- Compatible with a wide range of process gases
- Rugged industrial construction for continuous duty
Industrial Applications
- Semiconductor manufacturing and thin-film deposition
- Vacuum process systems and plasma etching
- Analytical instrumentation and gas chromatography
- Research and development laboratories
- Industrial gas blending and dosing systems
For technical inquiries, dimensional drawings, or replacement support for MKS GE50A-30352, contact the Pro-Hydraulic engineering team.
PRODUCT IMAGES
MKS GE50A-30352 Mass Flow Controller
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
Shop the MKS GE50A-30352 Mass Flow Controller. This precision-engineered industrial component delivers reliable performance and tight fluid control for heavy-duty systems.