Product Overview
The MKS 730IA-30973 / 1050504-001 is a high-precision capacitance manometer (absolute pressure transducer) engineered by MKS Instruments, a global leader in vacuum measurement and control technology. Operating on the capacitance diaphragm gauge (CDG) principle, this sensor utilizes a tensioned Inconel® diaphragm positioned between a reference vacuum and the process chamber. As absolute pressure changes, the diaphragm deflects, altering the capacitance between the diaphragm and a fixed electrode. This minute capacitance change is converted into a highly accurate, gas-independent pressure signal. Unlike thermal conductivity or Pirani gauges, the 730IA series provides true absolute pressure measurement independent of gas composition, making it indispensable for critical vacuum processes in semiconductor, thin-film, and industrial coating systems.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Capacitance Manometer (Absolute Pressure Sensor / Transducer) |
| Model Designation | 730IA-30973 / 1050504-001 |
| Measurement Principle | Capacitance Diaphragm Gauge (CDG) — gas composition independent |
| Measurement Range | Absolute pressure, full-scale range per 730IA series (typically 1 to 1000 Torr full scale) |
| Accuracy | High-accuracy class, typically ±0.15% to ±0.5% of reading |
| Diaphragm Material | Tensioned Inconel® alloy for corrosion resistance and thermal stability |
| Output Signal | Analog DC voltage output (0–10 VDC typical) proportional to pressure |
| Operating Temperature | Controlled sensor temperature for thermal zero and span stability |
| Mounting & Connection | Standard KF / CF vacuum flange interface with electrical connector |
| Compatible Controller | MKS 670, 660, or equivalent signal conditioning electronics |
Engineering Features & Advantages
- Gas Composition Independence: Capacitance diaphragm technology delivers true absolute pressure measurement regardless of gas species, eliminating the correction factors required by Pirani or thermocouple gauges.
- Exceptional Accuracy & Repeatability: High-resolution capacitance sensing provides precise, drift-resistant readings essential for process reproducibility in thin-film deposition and etch applications.
- Industrial Reliability: Constructed for continuous duty with durable, corrosion-resistant materials and proven engineering for maximum system uptime.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original MKS OEM standards, ensuring drop-in replacement without modification to existing manifolds or piping.
Typical Industrial Applications
Unlike thermal conductivity or Pirani gauges, the 730IA series provides true absolute pressure measurement independent of gas composition, making it indispensable for critical vacuum processes in semiconductor, thin-film, and industrial coating systems.
PRODUCT IMAGES
MKS 730IA-30973 / 1050504-001 Capacitance Manometer
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- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
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- Peace of Mind: Covered by our 12-Month Replacement Warranty.
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