Product Overview
The MKS LPV1-40-AK-CNZS is a precision-engineered vacuum isolation valve designed for demanding process and pneumatic control applications. Manufactured by MKS Instruments, a global leader in vacuum and pressure measurement and control solutions, this valve provides reliable on/off isolation of vacuum lines in semiconductor, thin-film deposition, and industrial vacuum systems. The LPV1 series utilizes a pneumatically actuated bellows-sealed poppet mechanism, ensuring leak-tight closure and minimal particle generation. Its compact body and standardized flange interface allow direct integration into existing vacuum manifolds and process chambers without modification.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Vacuum Isolation Valve (Pneumatic / Process Valve) |
| Model Designation | LPV1-40-AK-CNZS |
| Manufacturer | MKS Instruments |
| Valve Type | Pneumatically Actuated Bellows-Sealed Poppet Valve |
| Nominal Port Size | 40 mm (KF/ISO flange interface) |
| Operating Pressure Range | Vacuum to 2 bar (absolute), typical process isolation |
| Actuation Pressure | 4–7 bar (dry, oil-free compressed air) |
| Leak Rate | < 1 × 10⁻⁹ mbar·L/s (helium) |
| Mounting & Connection | Standard ISO-KF / CF flange interface |
| Body Material | Stainless Steel (corrosion-resistant) |
| Seal Material | Fluoroelastomer / PTFE (process compatible) |
Engineering Features & Advantages
- Precision Vacuum Isolation: Bellows-sealed poppet design delivers leak-tight shutoff with minimal internal volume and particle generation, ideal for sensitive vacuum processes.
- Pneumatic Actuation: Fast, repeatable open/close cycling via external compressed air supply, enabling automated process control and remote operation.
- Industrial Reliability: Constructed from corrosion-resistant stainless steel with high-cycle bellows, built for continuous operation in harsh vacuum environments.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original MKS standards, allowing straightforward retrofit into existing hydraulic systems without rework.
Typical Industrial Applications
Manufactured by MKS Instruments, a global leader in vacuum and pressure measurement and control solutions, this valve provides reliable on/off isolation of vacuum lines in semiconductor, thin-film deposition, and industrial vacuum systems.
PRODUCT IMAGES
MKS LPV1-40-AK-CNZS Vacuum Valve
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
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- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
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