Product Overview
The MKS UHV-25-AKK-ENVN is a precision-engineered ultra high vacuum (UHV) isolation valve designed for critical vacuum process control in semiconductor, thin-film deposition, and advanced research environments. Manufactured by MKS Instruments, a global leader in vacuum and pressure measurement and control solutions, this valve utilizes a pneumatically actuated, bellows-sealed gate mechanism to provide reliable isolation with minimal particle generation and outgassing. The UHV-25-AKK-ENVN is specifically configured for high-vacuum and ultra-high-vacuum applications where leak integrity, cleanliness, and repeatable sealing performance are paramount. Its compact body design and flange interface allow direct integration into standard UHV beamline and process chamber configurations, ensuring optimal conductance and minimal dead volume.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Ultra High Vacuum Valve (Pneumatic / Process Valve) |
| Model Designation | UHV-25-AKK-ENVN |
| Operating Pressure | High Vacuum to Ultra High Vacuum (≤ 1×10⁻⁹ mbar base pressure) |
| Mounting & Connection | Standard CF (ConFlat) or KF flange interface per ISO / Manufacturer specification |
| Actuation Type | Pneumatic, normally closed (spring-return) |
| Seal Material | Metal bonnet seal with elastomer or metal gate seal (application-dependent) |
| Body Material | Stainless Steel (304/316L grade) |
| Leak Rate | < 1×10⁻⁹ mbar·L/s (He) |
Engineering Features & Advantages
- Precision Vacuum Sealing: Bellows-sealed stem design eliminates dynamic O-ring friction and particulate generation, ensuring ultra-low leak rates and extended cycle life in contaminant-sensitive UHV processes.
- Industrial Reliability: Constructed from high-grade stainless steel with a robust pneumatic actuator, built for continuous operation under severe vacuum and thermal cycling conditions.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original MKS UHV-25 series mounting footprints and flange interfaces, enabling drop-in replacement without system modification.
- Minimal Outgassing: Internal surfaces are electropolished and cleaned to UHV standards, reducing virtual leaks and maintaining base pressure stability.
- Fast Actuation: Pneumatic operation provides rapid open/close cycles with consistent sealing force, ideal for automated process sequencing.
Typical Industrial Applications
This UHV valve is commonly deployed in semiconductor manufacturing equipment (PVD, CVD, and etch chambers), synchrotron and beamline vacuum systems, surface science and materials research instruments, and high-energy physics accelerator beamlines. It is also suitable for thin-film deposition systems, mass spectrometry,
PRODUCT IMAGES
MKS UHV-25-AKK-ENVN Ultra High Vacuum Valve
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
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- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
Shop the genuine MKS UHV-25-AKK-ENVN Solenoid Valve. This Germany-made 24 VDC hydraulic component features a 2-way normally closed design, delivering leak-free, reliable fluid control for heavy-duty industrial systems.