Product Overview
The OERLIKON LEYBOLD 85400 is a high-performance turbomolecular vacuum pump engineered for demanding industrial vacuum generation. Utilizing a multi-stage rotating rotor and stator blade assembly, this pump achieves exceptional compression ratios and ultra-low ultimate pressures by imparting momentum to gas molecules at high rotational speeds. As a critical component in high-vacuum systems, the 85400 model serves as the primary high-vacuum stage, typically backed by a rotary vane or dry roughing pump to exhaust gas to atmosphere. Its robust construction and precision-balanced rotor make it suitable for continuous duty in semiconductor processing, coating technology, and analytical instrumentation where hydrocarbon-free vacuum is essential.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Turbomolecular Vacuum Pump |
| Model Designation | 85400 |
| Operating Pressure | High Vacuum Range (Ultimate pressure down to 10-8 mbar) |
| Mounting & Connection | Standard ISO-K / CF Flange Interface |
| Pumping Mechanism | Multi-stage axial turbine rotor/stator blade assembly |
| Bearing Type | Precision hybrid ceramic or magnetic bearing options |
| Cooling Method | Water or forced air cooling (application dependent) |
Engineering Features & Advantages
- Precision Performance: High rotational speed and precisely machined blade geometry deliver superior compression ratios and rapid pump-down times for critical high-vacuum processes.
- Industrial Reliability: Built for continuous operation under severe industrial conditions with dynamically balanced rotor assemblies that minimize vibration and extend service life.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original OERLIKON LEYBOLD OEM standards, ensuring seamless integration into existing vacuum systems.
- Hydrocarbon-Free Operation: Dry compression path eliminates oil backstreaming, making it ideal for contamination-sensitive applications.
Typical Industrial Applications
This turbomolecular vacuum pump is widely deployed in semiconductor manufacturing equipment, physical vapor deposition and sputtering systems, mass spectrometry and surface analysis instruments, and high-energy particle accelerator beamlines. It is also commonly used in freeze-drying and lyophilization processes, electron microscopy, and leak detection systems where reliable ultra-high vacuum performance is mandatory.
PRODUCT IMAGES
OERLIKON LEYBOLD 85400 Turbomolecular Vacuum Pump
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
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