Product Overview
The OERLIKON LEYBOLD TMP 50 (Part Number 85400) is a high-performance turbomolecular vacuum pump engineered for demanding industrial and scientific vacuum generation. This unit operates on a precision multi-stage rotor/stator blade principle, driven by an integrated high-speed electric motor, to achieve exceptional compression ratios and ultra-low ultimate pressures. As a critical component in high-vacuum systems, it serves as the primary high-vacuum stage, typically backed by a rotary vane or dry roughing pump, and is widely deployed in semiconductor processing, analytical instrumentation, and advanced coating technologies where clean, oil-free vacuum is mandatory.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Turbomolecular Vacuum Pump |
| Model Designation | TMP 50 / 85400 |
| Operating Pressure | High-Vacuum Range (Ultimate pressure in the 10-7 mbar range) |
| Mounting & Connection | Standard ISO-K / CF Flange Interface |
Engineering Features & Advantages
- Precision Performance: Multi-stage turbomolecular rotor design delivers high compression ratios for light gases, ensuring rapid pump-down and stable ultra-high vacuum generation.
- Industrial Reliability: Built for continuous operation under severe industrial conditions, featuring robust bearing systems and thermal management for extended service intervals.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original OERLIKON LEYBOLD OEM standards, including flange geometry and electrical connections.
Typical Industrial Applications
This turbomolecular vacuum pump is typically employed in semiconductor wafer fabrication and ion implantation systems, analytical instrumentation such as mass spectrometers and electron microscopes, high-vacuum coating and thin-film deposition equipment, and research laboratory ultra-high vacuum chambers requiring oil-free, hydrocarbon-free operation.
PRODUCT IMAGES


OERLIKON LEYBOLD TMP 50 / 85400 Turbomolecular Vacuum Pump
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
Shop the genuine OERLIKON LEYBOLD TMP 50 / 85400 Turbomolecular Vacuum Pump. This Germany-made high-vacuum pump features a hybrid bearing design, delivering oil-free, reliable vacuum performance for heavy-duty industrial systems.