Product Overview
The Pfeiffer Vacuum ATH 500M (VY4121G4) is a magnetically levitated turbomolecular vacuum pump engineered for high-vacuum generation in demanding industrial and research environments. Utilizing a frictionless magnetic bearing system, the rotor operates without mechanical contact, eliminating wear particles and lubrication contamination while delivering exceptional rotational speed and compression ratios. This pump is designed to serve as a primary high-vacuum source in systems requiring oil-free, hydrocarbon-free operation, such as semiconductor manufacturing, thin-film deposition, and analytical instrumentation. Its integrated drive electronics and water-cooling provisions ensure stable performance under continuous industrial duty cycles.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Turbomolecular Vacuum Pump (Magnetically Levitated) |
| Model Designation | ATH 500M / VY4121G4 |
| Operating Pressure | High-vacuum range (Ultimate pressure < 1×10⁻⁷ mbar) |
| Mounting & Connection | Standard ISO-K / CF flange interface (manufacturer-specific) |
Engineering Features & Advantages
- Precision Performance: Magnetically levitated rotor eliminates mechanical contact, enabling oil-free, vibration-damped operation with high rotational speeds and superior compression ratios for critical high-vacuum processes.
- Industrial Reliability: Built for continuous operation under severe industrial conditions, with integrated thermal management and robust drive electronics ensuring long service intervals and minimal maintenance.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original OEM Pfeiffer Vacuum standards, including the VY4121G4 controller interface, for drop-in system integration.
Typical Industrial Applications
This turbomolecular vacuum pump is commonly deployed in semiconductor fabrication equipment (PVD, CVD, ion implantation), analytical instruments such as mass spectrometers and electron microscopes, high-energy physics research facilities, and industrial coating systems requiring clean, hydrocarbon-free high-vacuum environments. It is also suited for leak detection systems and freeze-drying processes where contamination-free vacuum is essential.
PRODUCT IMAGES





Pfeiffer Vacuum ATH 500M / VY4121G4 Magnetically Levitated Turbomolecular Vacuum Pump
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
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