Product Overview
The Pfeiffer Vacuum EVB 025 PA is a precision-engineered vacuum isolation valve designed for reliable shut-off and control of gas flow in vacuum systems. As a pneumatically actuated angle valve, the EVB series provides fast, repeatable isolation between vacuum chambers and pumping systems, making it an essential component in semiconductor processing, analytical instrumentation, and industrial vacuum coating operations. The “PA” designation indicates a pneumatically actuated configuration with a bellows-sealed stem, ensuring leak-tight performance and minimal particle generation in demanding high-vacuum environments.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | Vacuum Isolation Valve (Pneumatic Angle Valve) |
| Model Designation | EVB 025 PA |
| Nominal Flange Size | DN 25 ISO-KF / ISO-K (dependent on configuration) |
| Actuation Type | Pneumatic, normally closed (NC) or normally open (NO) variants |
| Operating Pressure Range | Vacuum to 1 bar (absolute), control air 4–7 bar |
| Leak Rate (Body/Seat) | < 1 × 10⁻⁹ mbar·L/s (helium) |
| Mounting & Connection | ISO-KF flange interface, standard vacuum connection |
| Seal Material | FKM (Viton) or PTFE bellows seal |
Engineering Features & Advantages
- Precision Performance: Bellows-sealed stem design eliminates friction and particle generation, ensuring ultra-clean operation and long service life in high-vacuum and UHV applications.
- Fast Pneumatic Actuation: Rapid open/close response enables efficient cycle times in automated vacuum processes and load-lock systems.
- Industrial Reliability: Built for continuous operation under severe industrial conditions, with robust construction resistant to thermal cycling and corrosive media.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original Pfeiffer Vacuum OEM standards, ensuring drop-in replacement without modification.
- Leak-Tight Isolation: High-integrity sealing mechanism maintains vacuum integrity, protecting process chambers and pumping systems from contamination.
Typical Industrial Applications
The Pfeiffer Vacuum EVB 025 PA vacuum valve is widely deployed in semiconductor manufacturing equipment, where precise vacuum isolation is critical for wafer processing and load-lock operations. It is also used in analytical instrumentation such as mass spectrometers and electron microscopes, industrial vacuum coating and thin-film deposition systems, and research laboratory vacuum rigs requiring reliable, repeatable isolation between vacuum chambers and pumps.
PRODUCT IMAGES

PFEIFFER VACUUM EVB 025 PA Vacuum Valve
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
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- Peace of Mind: Covered by our 12-Month Replacement Warranty.
Shop the genuine PFEIFFER VACUUM EVB 025 PA Vacuum Valve. This German-made vacuum valve features a reliable sealing mechanism, delivering leak-free, precise gas flow control for demanding industrial vacuum systems.