The PFEIFFER VACUUM TMH 064 is a heavy-duty turbomolecular pump engineered for high-vacuum generation in industrial and research applications. It operates on a purely mechanical principle, using a high-speed rotating rotor with turbine blades to impart momentum to gas molecules, directing them toward the exhaust. This design achieves ultimate pressures in the high-vacuum range without the use of seals or lubricants in the vacuum chamber, ensuring hydrocarbon-free operation.
PFEIFFER VACUUM TMH 064 Technical Specifications
| Pump Type | Turbomolecular |
| Flange Inlet | DN 63 ISO-K |
| Flange Outlet | DN 25 ISO-KF |
| Pumping Speed (N2) | 60 L/s |
| Ultimate Pressure | < 1 x 10-7 mbar |
| Max. Rotational Speed | 60,000 rpm |
| Cooling Method | Air or Water |
| Operating Voltage | 24 V DC |
Key Engineering Features
- High-speed rotor with precision-machined turbine blades for efficient molecular pumping
- Oil-free operation eliminates backstreaming and contamination in the vacuum chamber
- Compact, robust construction with integrated cooling for continuous industrial use
- Wide operating temperature range and high tolerance to process gases
- Compatible with Pfeiffer Vacuum controllers and accessories for system integration
Industrial Applications
- Semiconductor manufacturing and thin-film deposition
- Mass spectrometry and surface analysis
- Leak detection systems and vacuum coating
- Research laboratories and high-energy physics
- Industrial vacuum furnaces and metallurgy
For technical inquiries, dimensional drawings, or replacement support for PFEIFFER VACUUM TMH 064, contact the Pro-Hydraulic engineering team.
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PFEIFFER VACUUM TMH 064 Turbomolecular Pump
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
Shop the PFEIFFER VACUUM TMH 064 Turbomolecular Pump. This precision-engineered high-vacuum component delivers reliable performance and tight pressure control for demanding industrial systems.