Product Overview
The SMC XGT0101-30-1A-X16S is a high vacuum slit valve engineered by SMC Corporation, a global leader in pneumatic and vacuum control technology. Unlike conventional hydraulic directional valves, this component operates on a pneumatic/vacuum actuation principle, utilizing a precision-machined gate mechanism that slides through a narrow slit aperture to isolate or connect vacuum chambers. Its primary role is to provide reliable, leak-tight isolation between process chambers and transfer modules in high-vacuum environments, ensuring contamination-free wafer or substrate handling. The valve is designed for integration into cluster tools, load-lock systems, and other semiconductor process platforms where vacuum integrity and rapid cycle times are critical.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | High Vacuum Slit Valve (Pneumatic/Vacuum Actuated) |
| Model Designation | XGT0101-30-1A-X16S |
| Operating Pressure | Pneumatic Actuation: 0.4–0.7 MPa (4–7 bar); Vacuum Range: 10⁻⁶ to 10⁻⁹ Torr |
| Mounting & Connection | Standard ISO-KF / CF Flange Interface (Manufacturer Specific) |
| Valve Actuation | Double-Acting Pneumatic Cylinder with Position Sensing |
| Leak Rate | < 1 × 10⁻⁹ Pa·m³/s (Helium Standard) |
| Body Material | Corrosion-Resistant Stainless Steel / Aluminum Alloy |
| Seal Material | Fluoroelastomer (FKM) / Perfluoroelastomer (FFKM) Options |
| Temperature Range | 10°C to 80°C (Operating); Bakeable to 120°C (Optional) |
Engineering Features & Advantages
- Precision Vacuum Isolation: The slit valve gate mechanism ensures a metal-to-elastomer seal that maintains ultra-high vacuum integrity, minimizing particle generation and outgassing for critical semiconductor processes.
- Rapid Actuation Cycle: Pneumatic double-acting cylinder provides fast open/close cycles with adjustable speed control, reducing wafer transfer times and increasing throughput in cluster tools.
- Industrial Reliability: Built for continuous operation under severe vacuum and thermal cycling conditions, with robust construction that withstands millions of actuation cycles without degradation.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original SMC XGT series specifications, ensuring drop-in replacement without modification to existing vacuum interfaces.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original SMC OEM standards, ensuring drop-in replacement without modification to existing manifolds or piping.
Typical Industrial Applications
The valve is designed for integration into cluster tools, load-lock systems, and other semiconductor process platforms where vacuum integrity and rapid cycle times are critical.
PRODUCT IMAGES
SMC XGT0101-30-1A-X16S High Vacuum Slit Valve
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
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- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
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