Product Overview
The SMC XGT200-30-1A-X5 is a high vacuum slit valve engineered by SMC Pneumatics for precision isolation and transfer control in semiconductor, thin-film, and high-vacuum process environments. Operating on a pneumatically actuated mechanism, this valve utilizes a slit-type gate configuration that enables unobstructed wafer or substrate transfer while maintaining a reliable vacuum seal when closed. As part of SMC’s XGT series, it is designed for integration into cluster tools, load-lock chambers, and transfer modules where contamination control, minimal particle generation, and repeatable sealing performance are critical. The valve’s compact body and precision-machined sealing surfaces ensure stable operation under high vacuum conditions, making it a key component in advanced industrial vacuum systems.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | High Vacuum Slit Valve (Pneumatically Actuated Process Valve) |
| Model Designation | XGT200-30-1A-X5 |
| Manufacturer | SMC Pneumatics |
| Valve Type | Slit / Gate Isolation Valve |
| Actuation | Pneumatic (Double-Acting Cylinder) |
| Operating Pressure | Standard Industrial Grade (0.4–0.7 MPa air supply) |
| Vacuum Range | High Vacuum Compatible (down to 10⁻⁶ Pa class) |
| Mounting & Connection | Standard ISO / Manufacturer Interface (KF, CF, or bolt-flange per XGT series) |
| Seal Material | Fluorocarbon / Perfluoroelastomer (Vacuum-Grade) |
| Body Material | Stainless Steel / Aluminum Alloy (Corrosion-Resistant) |
Engineering Features & Advantages
- Precision Vacuum Sealing: The slit-gate design delivers a uniform, high-integrity seal across the full aperture, minimizing leak rates and maintaining chamber isolation during critical process steps.
- Low Particle Generation: Engineered contact surfaces and smooth actuation reduce particulate contamination, meeting cleanroom and semiconductor process requirements.
- Pneumatic Actuation Reliability: Double-acting pneumatic cylinder ensures consistent open/close force and fast response times, even under repeated high-cycle operation.
- Compact Integration: Slim profile and standardized mounting interface allow direct replacement and easy integration into existing vacuum transfer modules.
- Industrial Reliability: Constructed for continuous duty with durable, corrosion-resistant materials and proven engineering for maximum system uptime.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original SMC OEM standards, ensuring drop-in replacement without modification to existing manifolds or piping.
Typical Industrial Applications
The valve’s compact body and precision-machined sealing surfaces ensure stable operation under high vacuum conditions, making it a key component in advanced industrial vacuum systems.
PRODUCT IMAGES
SMC XGT200-30-1A-X5 High Vacuum Slit Valve
⚡ Emergency Plant Maintenance & Ready-to-Ship Notice:
- Authentic & Fully Tested: 100% bench tested for hydraulic response, pressure rating, and null-bias stability before dispatch.
- Fast Dispatch: In-stock units ready for same-day dispatch via DHL / FedEx Express directly to your plant.
- Pre-Shipment Verification: High-definition photos, video testing runs, and serial number verification provided prior to shipment.
- Peace of Mind: Covered by our 12-Month Replacement Warranty.
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