Product Overview
The SMC XLA-25-X612 is a high vacuum angle valve engineered by SMC Corporation, a global leader in pneumatic and vacuum control technology. This component operates as a pneumatically actuated, bellows-sealed isolation valve designed for precise on/off control of gas flow in high vacuum systems. The angle body configuration (90° inlet-to-outlet orientation) minimizes conductance loss and eliminates trapped volumes, making it ideal for semiconductor manufacturing, thin-film deposition, and analytical instrumentation where contamination control and leak integrity are critical. The valve utilizes a bellows-sealed stem to isolate the actuator mechanism from the vacuum environment, ensuring zero particulate generation and extended service life in process-critical applications.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | High Vacuum Angle Valve (Pneumatic / Process Valve) |
| Model Designation | XLA-25-X612 |
| Manufacturer | SMC Corporation |
| Port Size | 25 mm (Nominal KF/ISO flange compatible) |
| Valve Actuation | Pneumatic (Double-acting or spring-return, depending on configuration) |
| Seal Type | Bellows-sealed stem with elastomer or metal bonnet seal |
| Operating Pressure Range | Vacuum service (typically 10⁻⁶ to 10⁻⁸ Torr range); actuator supply 0.4–0.7 MPa |
| Mounting & Connection | ISO-KF or CF flange interface (standard vacuum fitting) |
| Body Material | Stainless Steel (SUS304 / SUS316L) |
| Leak Rate | < 1 × 10⁻⁹ Pa·m³/s (He) |
Engineering Features & Advantages
- Precision Vacuum Control: The angle body design provides high conductance and rapid pump-down, while the bellows-sealed stem ensures zero external leakage and eliminates particle generation from dynamic seals.
- Industrial Reliability: Constructed from corrosion-resistant stainless steel with a robust pneumatic actuator, the XLA series is engineered for millions of maintenance-free cycles in continuous vacuum processes.
- Direct Fit Replacement: Exact dimensional and functional compatibility with standard ISO-KF and CF flange interfaces, allowing drop-in replacement for existing SMC XLA series valves without system modification.
- Direct Fit Replacement: Precision-manufactured to original SMC specifications for direct replacement, minimising downtime and eliminating fitment issues.
Typical Industrial Applications
The valve utilizes a bellows-sealed stem to isolate the actuator mechanism from the vacuum environment, ensuring zero particulate generation and extended service life in process-critical applications.
PRODUCT IMAGES




SMC XLA-25-X612 High Vacuum Angle Valve
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Shop the genuine SMC XLA-25-X612 High-Pressure Hydraulic Valve. This Japan-made 24 VDC hydraulic component features a poppet-type design, delivering leak-free, reliable fluid control for heavy-duty industrial systems.