Product Overview
The SMC XLA-25H3 is a high vacuum angle valve engineered for precision vacuum control in industrial pneumatic and process systems. Manufactured by SMC Corporation, a global leader in pneumatic and vacuum automation technology, this valve features an angle-body configuration that provides a straight-through flow path with minimal conductance loss. The XLA series is designed for high vacuum applications, utilizing a bellows-sealed or elastomer-sealed poppet mechanism to isolate the vacuum environment from the actuator. The valve is typically pneumatically actuated, offering reliable on/off control of vacuum lines in semiconductor, coating, and analytical instrumentation systems. Its 25 mm nominal port size and KF (NW) flange connections ensure compatibility with standard high vacuum piping components.
Technical Specifications
| Parameter | Specification / Feature |
|---|---|
| Component Type | High Vacuum Angle Valve (Pneumatic / Process Valve) |
| Model Designation | XLA-25H3 |
| Nominal Port Size | 25 mm (approx. 1 inch) |
| Flange Connection | KF (NW) 25 high vacuum flange |
| Operating Pressure Range | Vacuum service (typically 10⁻⁶ Pa to atmospheric); pilot air 0.4–0.7 MPa |
| Actuation Type | Pneumatic (double-acting or spring-return, depending on configuration) |
| Body Material | Stainless steel (SUS304 / SUS316 equivalent) |
| Seal Material | Fluoroelastomer (FKM) or perfluoroelastomer (FFKM) for high vacuum compatibility |
| Leak Rate | < 1 × 10⁻⁹ Pa·m³/s (helium leak rate, typical) |
| Mounting & Connection | Standard ISO KF flange interface; panel or line mounting |
Engineering Features & Advantages
- Precision Vacuum Control: The angle-body design minimizes flow resistance and particle entrapment, ensuring rapid evacuation and precise on/off vacuum control in critical processes.
- High Conductance & Low Outgassing: Stainless steel construction and high-grade elastomer seals deliver excellent vacuum performance with minimal outgassing, suitable for high and ultra-high vacuum environments.
- Industrial Reliability: Built for continuous duty in semiconductor, coating, and analytical equipment, with a robust pneumatic actuator providing millions of maintenance-free cycles.
- Direct Fit Replacement: Exact dimensional and functional compatibility with original SMC standards, allowing straightforward retrofit into existing hydraulic systems without rework.
Typical Industrial Applications
The valve is typically pneumatically actuated, offering reliable on/off control of vacuum lines in semiconductor, coating, and analytical instrumentation systems.
PRODUCT IMAGES
SMC XLA-25H3 High Vacuum Angle Valve
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Shop the genuine SMC XLA-25H3 High-Pressure Hydraulic Valve. This Japan-made 24V DC hydraulic component features a poppet-type design, delivering leak-free, reliable fluid control for heavy-duty industrial systems.